Galerkin-FEM approach for dynamic recovering of the plate profile in electrostatic MEMS with fringing field
Mario Versaci,
Giovanni Angiulli,
Luisa Angela Fattorusso
et al.
Abstract:Purpose
Based on previous results of the existence, uniqueness, and regularity conditions for a continuous dynamic model for a parallel-plate electrostatic micro-electron-mechanical-systems with the fringing field, the purpose of this paper concerns a Galerkin-FEM procedure for deformable element deflection recovery. The deflection profiles are reconstructed by assigning the dielectric properties of the moving element. Furthermore, the device’s use conditions and the deformable element’s mechanical stresses ar… Show more
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