Wavelength-Tunable Laser-Diode Interferometer

Ishii, Yukihiro

doi:10.1007/s10043-999-0273-3

Cited by 24 publications

(5 citation statements)

References 79 publications

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“…Unlike VSI, wavelength scanning interferometry (WSI) can perform absolute surface height measurement without any mechanical scanning [66,67]. The fundamental principle of WSI is to derive the OPD between the reference light and the object light by the wavelength scanning of a tunable laser [68][69][70][71]. The measurement based on WSI relies on wavelength variations to achieve phase shifts without introducing any 2π phase ambiguity.…”

Section: Wavelength Scanning Interferometrymentioning

confidence: 99%

Development of surface reconstruction algorithms for optical interferometric measurement

2020

Front. Mech. Eng.

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Optical interferometry is a powerful tool for measuring and characterizing areal surface topography in precision manufacturing. A variety of instruments based on optical interferometry have been developed to meet the measurement needs in various applications, but the existing techniques are simply not enough to meet the ever-increasing requirements in terms of accuracy, speed, robustness, and dynamic range, especially in on-line or on-machine conditions. This paper provides an in-depth perspective of surface topography reconstruction for optical interferometric measurements. Principles, configurations, and applications of typical optical interferometers with different capabilities and limitations are presented. Theoretical background and recent advances of fringe analysis algorithms, including coherence peak sensing and phase-shifting algorithm, are summarized. The new developments in measurement accuracy and repeatability, noise resistance, self-calibration ability, and computational efficiency are discussed. This paper also presents the new challenges that optical interferometry techniques are facing in surface topography measurement. To address these challenges, advanced techniques in image stitching, on-machine measurement, intelligent sampling, parallel computing, and deep learning are explored to improve the functional performance of optical interferometry in future manufacturing metrology.

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Section: Wavelength Scanning Interferometrymentioning

confidence: 99%

Development of surface reconstruction algorithms for optical interferometric measurement

2020

Front. Mech. Eng.

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“…19 In Japan, the method proposed by Yamaguchi et al is that the characteristics of the output laser are obtained by measuring the phase offset, then fed back to the computer and processed, thereby further changing the injection current of the laser and achieving modulation of the laser. 20,21 In the United Kingdom, Hancock et al 22 also proposed a similar method, where the CCD (Charge-Coupled Device) and sinusoidal phase modulation are used to modulate the input current of the semiconductor laser, so that the modulated laser signal has higher accuracy. The method of using photothermal to modulate the semiconductor laser has also been the subject of early research in the United States and Japan.…”

Section: Introductionmentioning

confidence: 99%

A novel power stability drive system of semiconductor Laser Diode for high-precision measurement

Huang

Wang

et al. 2019

Measurement and Control

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In view of the strict requirements of the current high-precision measurement system for stable output power of the semiconductor LD (Laser Diode), a semiconductor LD stable power drive and multi-closed-loop control system are proposed after analyzing the semiconductor laser’s P–I (Power–Current) characteristics and temperature characteristics. The system uses a microcontroller as the core control unit and realizes the stable power output control of the semiconductor laser by controlling the current, power and temperature parameters. In this system, first, the control structure model of the controlled object has been designed. Second, a controllable closed-loop constant current feedback drive circuit has been designed and a high-precision controllable constant current drive circuit of the semiconductor laser has been obtained. Furthermore, the control circuit has been designed based on the neural PI (Proportional-Integral) control model and realizes the short-term stable power output of the semiconductor LD. Finally, a closed-loop temperature control system is designed to ensure that the operating temperature of the semiconductor laser is relatively stable and a long-term stable power output is obtained. By designing the hardware and software of the control system and conducting long-term experiments in the laboratory, we found that the system can guarantee the output power within 1 W of PD (Proportional-Differential) LD, and its long-term power stability can reach 1%. This system has a certain reference significance in using semiconductor lasers for high-quality detection when there are stringent requirements for power.

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“…A phase shifting in interferometers (PSI) 17 through the direct frequency modulation of an LD source has been reported. 18 The problem associated with doing the measurement is that an increase of current results in an increase of LD power, violating the assumption of constant intensity in the phaseextraction algorithm. A phase-extraction algorithm that is insensitive to the changes in laser power is given by a six stepwise phase-shifting method.…”

Section: Introductionmentioning

confidence: 99%

<title>Phase-shifting joint transform correlator with a wavelength-shifted laser diode</title>

Takahashi

Ishii

2002

SPIE Proceedings

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A joint-transform phase correlator is presented for processing multiple-pattern recognition that uses the six-step phaseshifting interferometer with a wavelength-shifted laser diode. The correlation peaks are obtained by the numerical Fourier transformation of a measured phase in an on-axis joint power spectrum. Multiple-pattern phase correlation can be performed to demonstrate high discrimination without the intermodulation owing to zero optical path differences between multiple targets in the interferometer. The experimental results are shown.

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Wavelength-Tunable Laser-Diode Interferometer

Cited by 24 publications

References 79 publications

Development of surface reconstruction algorithms for optical interferometric measurement

Development of surface reconstruction algorithms for optical interferometric measurement

A novel power stability drive system of semiconductor Laser Diode for high-precision measurement

<title>Phase-shifting joint transform correlator with a wavelength-shifted laser diode</title>

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