Wavelength scanning interferometry using multiple light sources

Dávila, A.

doi:10.1364/oe.24.005311

Cited by 15 publications

(11 citation statements)

References 14 publications

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“…and after the Fourier transform of Eq. 3, and except for a negligible zero order factor, we obtain equivalent equations to those obtained in wavelength scanning interferometry: 12 IðÃÞ…”

Section: Interference Using Compound Prisms In a Mach-zehnder Interfementioning

confidence: 85%

“…The virtual interferogram is sampled at regular intervals δx according to x=x0+nδx, where n is an integer, now defining the phase slope as and after the Fourier transform of Eq. 3, and except for a negligible zero order factor, we obtain equivalent equations to those obtained in wavelength scanning interferometry: 12 except that now the variable Λ is now related to the phase slope, W∼ depends on the coherence degree, and the spatial dimensions of the illuminated interference area is sampled by the projection of the camera detector of length w onto the virtual plane. The phase should not change by more than π between successive x samples.…”

Section: Interference Using Compound Prisms In a Mach–zehnder Interfementioning

confidence: 93%

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Mach–Zehnder Stationary Two-Beam Spectroscopy Using Compound Prisms

et al. 2018

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An interferometric optical setup for diffraction-less spectroscopy is tested as an optical design for control of interference frequency. Its design is based on a Mach-Zehnder interferometer in which a pair of compound prisms is introduced in the interferometer path to obtain interference patterns, which avoids the diffraction phenomena and nonlinear dispersion found on spectrometers that use gratings. Computer simulations of the interference patterns generated by the proposed optical setup are presented, and confirmed by the experimental results of the optical implementation. The theory that describes an ideal optical setup and the experimental results show that in order to reduce the combined uncertainties of wavelength measurement, a precise control in angle deviation and magnification are required for the reduction of measurement uncertainties.

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“…and after the Fourier transform of Eq. 3, and except for a negligible zero order factor, we obtain equivalent equations to those obtained in wavelength scanning interferometry: 12 IðÃÞ…”

Section: Interference Using Compound Prisms In a Mach-zehnder Interfementioning

confidence: 85%

Section: Interference Using Compound Prisms In a Mach–zehnder Interfementioning

confidence: 93%

Mach–Zehnder Stationary Two-Beam Spectroscopy Using Compound Prisms

et al. 2018

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“…[11][12][13] Depending on the difference of measurement principles, the 3D shape metrology of measuring specular surfaces can be classified as contact method 14 and noncontact method. [15][16][17][18][19][20][21][22][23][24][25][26][27][28] The coordinate measurement machine (CMM) 14 is a superior choice for measuring specular surfaces by touching the measured surface and scanning along two-dimensional (2D) directions in contact method. Although CMM has the drawbacks of high cost, low speed, and scratching of the surface, 29 it is still the most widely used method for specular surface measurement because touch probes are highly accurate for dimensional inspection.…”

Section: Introductionmentioning

confidence: 99%

Phase measuring deflectometry for obtaining 3D shape of specular surface: a review of the state-of-the-art

et al. 2021

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Phase measuring deflectometry (PMD) is a superior technique to obtain three-dimensional (3D) shape information of specular surfaces because of its advantages of large dynamic range, noncontact operation, full-field measurement, fast acquisition, high precision, and automatic data processing. We review the recent advances on PMD. The basic principle of PMD is introduced following several PMD methods based on fringe reflection. First, a direct PMD (DPMD) method is reviewed for measuring 3D shape of specular objects having discontinuous surfaces. The DPMD method builds the direct relationship between phase and depth data, without gradient integration procedure. Second, an infrared PMD (IR-PMD) method is reviewed to measure specular objects. Because IR light is used as a light source, the IR-PMD method is insensitive to the effect of ambient light on the measured results and has high measurement accuracy. Third, a proposed method is reviewed to measure the 3D shape of partial reflective objects having discontinuous surfaces by combining fringe projection profilometry and DPMD. Then, the effects of error sources that mainly include phase error and geometric calibration error on the measurement results are analyzed, and the performance of the 3D shape measurement system is also evaluated. Finally, the future research directions of PMD are discussed.

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“…A reference is normally required for interferometry; therefore, it is hard to measure complicated aspheric mirrors or free-form specular objects. White light interferometry [ 16 ], wavelength scanning interferometer [ 17 ] and multiple wavelength interferometer [ 18 ] can be used to measure specular objects having discontinuous surfaces. However, the field of view of the objective lens, the range of the scanner and the limited synthetic wavelength are restricted to the measurement range.…”

Section: Introductionmentioning

confidence: 99%

Three-Dimensional Shape Measurements of Specular Objects Using Phase-Measuring Deflectometry

Zhang

Wang

Huang

et al. 2017

Sensors

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The fast development in the fields of integrated circuits, photovoltaics, the automobile industry, advanced manufacturing, and astronomy have led to the importance and necessity of quickly and accurately obtaining three-dimensional (3D) shape data of specular surfaces for quality control and function evaluation. Owing to the advantages of a large dynamic range, non-contact operation, full-field and fast acquisition, high accuracy, and automatic data processing, phase-measuring deflectometry (PMD, also called fringe reflection profilometry) has been widely studied and applied in many fields. Phase information coded in the reflected fringe patterns relates to the local slope and height of the measured specular objects. The 3D shape is obtained by integrating the local gradient data or directly calculating the depth data from the phase information. We present a review of the relevant techniques regarding classical PMD. The improved PMD technique is then used to measure specular objects having discontinuous and/or isolated surfaces. Some influential factors on the measured results are presented. The challenges and future research directions are discussed to further advance PMD techniques. Finally, the application fields of PMD are briefly introduced.

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Wavelength scanning interferometry using multiple light sources

Cited by 15 publications

References 14 publications

Mach–Zehnder Stationary Two-Beam Spectroscopy Using Compound Prisms

Mach–Zehnder Stationary Two-Beam Spectroscopy Using Compound Prisms

Phase measuring deflectometry for obtaining 3D shape of specular surface: a review of the state-of-the-art

Three-Dimensional Shape Measurements of Specular Objects Using Phase-Measuring Deflectometry

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