2017
DOI: 10.3390/s17122835
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Three-Dimensional Shape Measurements of Specular Objects Using Phase-Measuring Deflectometry

Abstract: The fast development in the fields of integrated circuits, photovoltaics, the automobile industry, advanced manufacturing, and astronomy have led to the importance and necessity of quickly and accurately obtaining three-dimensional (3D) shape data of specular surfaces for quality control and function evaluation. Owing to the advantages of a large dynamic range, non-contact operation, full-field and fast acquisition, high accuracy, and automatic data processing, phase-measuring deflectometry (PMD, also called f… Show more

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Cited by 71 publications
(30 citation statements)
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“…Phase-measuring deflectometry (PMD)-based methods have been widely used in 3D shape measurement of specular objects, because they offer the advantages of a large dynamic range, high accuracy, and full-field, noncontact, and automatic data processing [11,12,13]. The fundamental principle of the PMD method is the fringe reflection technique.…”
Section: Introductionmentioning
confidence: 99%
“…Phase-measuring deflectometry (PMD)-based methods have been widely used in 3D shape measurement of specular objects, because they offer the advantages of a large dynamic range, high accuracy, and full-field, noncontact, and automatic data processing [11,12,13]. The fundamental principle of the PMD method is the fringe reflection technique.…”
Section: Introductionmentioning
confidence: 99%
“…However, these 3D measurement techniques usually fail to deal with mirror-like specular surfaces subject to the strong reflectance. Instead of avoiding the specular reflection by coating the surface with powders, the phase measuring deflectometry (PMD) technique [10][11][12] takes full advantage of the surface reflective property, which captures the virtual image reflected by the target surface. By analyzing the deformed strip patterns captured by the camera, precise discrete slope variations of the test surface can be calculated.…”
Section: Introductionmentioning
confidence: 99%
“…PMD has been applied to measure aspheric mirrors and dynamic specular surfaces, detect subsurface cracks, and has been used on specular surfaces from micro-scale to large scales [ 8 , 9 , 10 , 11 , 12 , 13 ]. For example, aspherical and spherical mirrors, silicon wafers and ball grid array, automobile industry (automotive glass, car body) [ 14 ]. This technique must display straight sinusoidal fringe patterns on a liquid crystal display (LCD) screen or project a structured pattern onto ground glass.…”
Section: Introductionmentioning
confidence: 99%