Wavelength control of vertical cavity surface-emitting lasers by using nonplanar MOCVD

Koyama, Fumio; Mukaihara, T.; Hayashi, Yusuke; Ohnoki, N.; Hatori, Nobuaki; Iga, Kenichi

doi:10.1109/68.363392

Cited by 38 publications

(6 citation statements)

References 9 publications

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“…For this purpose, a multiple-wavelength VCSEL array will be a key device. [17] We have spent much effort for realizing multiple-wavelength VCSEL array on patterned substrates [18]. We demonstrated a single-mode multiple-wavelength VCSEL array on a patterned GaAs substrate covering a wavelength window of 1.1-1.2 µm as shown in Fig.…”

Section: Wavelength Integration On Patterned Substratementioning

confidence: 99%

Recent progress of vertical-cavity surface emitting lasers: wavelength engineering and new functions

Koyama

2004

SPIE Proceedings

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Vertical cavity surface emitting lasers (VCSELs) have been extensively developed and are now key devices in local area networks based on multi-mode optical fibers. Long wavelength VCSELs are currently attracting much interest for use in single-mode fiber metropolitan area and wide area networks. Also, parallel data links including board-to-board interconnections with low threshold VCSEL arrays are also under development. Low threshold single-mode VCSEL arrays will enable us to realize parallel optical interconnects with low power consumption.We have developed highly strained GaInAs/GaAs QW VCSELs emitting at 1.1-1.2 µm band. Excellent temperature characteristics have been realized. We present long wavelength GaInAs VCSELs on GaAs substrates, enabling uncooled operation for high speed data transmission in single-mode fibers. Also, we will discuss a possibility of isolator-free operations of single-mode VCSELs. In addition, we demonstrated a single-mode multiple-wavelength VCSEL array on a patterned GaAs substrate for the wavelength engineering of VCSELs. The maximum lasing span of arrays is over 190 nm. Densely integrated multi-wavelength arrays are presented.Tunable micromachined VCSELs are also attracting much interest for WDM networking, because micromachined tunable VCSELs enable wide continuous tuning. We proposed and demonstrated a micromachined tunable vertical cavity with a strain control layer, which gives us novel functions including temperature insensitive operation, thermal wavelength tuning, and so on. We also propose and demonstrate injection-locked VCSELs for all-optical signal processing. Some results on optical inverters, optical bistable devices and optical regenerators will be reported.Toward other applications including optical storages and sensing, we will describe metal nano-aperture VCSELs for near-field optics.

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Section: Wavelength Integration On Patterned Substratementioning

confidence: 99%

Recent progress of vertical-cavity surface emitting lasers: wavelength engineering and new functions

Koyama

2004

SPIE Proceedings

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“…Multiple-wavelength VCSEL arrays have been studied for this purpose. [31][32][33] Ultrahigh capacity chip-to-chip optical interconnect based on WDM VCSEL arrays was demonstrated, leading to a total bit rate approaching 1 Tb/s. 34) MEMS (micro electro mechanical system) based tunable VCSELs [35][36][37] are attracting much interest because of their wide continuous tuning.…”

Section: Introductionmentioning

confidence: 99%

Advances and new functions of VCSEL photonics

Koyama

2014

OPT REV

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A vertical cavity surface emitting laser (VCSEL) was born in Japan. The 37 years' research and developments opened up various applications including datacom, sensors, optical interconnects, spectroscopy, optical storages, printers, laser displays, laser radar, atomic clock and high power sources. A lot of unique features have been already proven, such as low power consumption, a wafer level testing and so on. The market of VCSELs has been growing up rapidly and they are now key devices in local area networks based on multi-mode optical fibers. Optical interconnections in data centers and supercomputers are attracting much interest. In this paper, the advances on VCSEL photonics will be reviewed. We present the high-speed modulation of VCSELs based on a coupled cavity structure. For further increase in transmission capacity per fiber, the wavelength engineering of VCSEL arrays is discussed, which includes the wavelength stabilization and wavelength tuning based on a micro-machined cantilever structure. We also address a lateral integration platform and new functions, including high-resolution beam scanner, vortex beam creation and large-port free space wavelength selective switch with a Bragg reflector waveguide.

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“…A change in the layer thickness directly translates to a change in the lasing wavelength due to the round trip phase condition of a VCSEL cavity [1,2]. Thickness variations achieved by leveraging the natural non-uniformity in a molecular beam epitaxy (MBE) system [1,2], patterned substrates [3], nonplanar metalorganic chemical vapor deposition [4], or anodic oxidation of a GaAs spacer layer [5] were reported. However, none of the previously reported techniques led to precise control of the lasing wavelength.…”

Section: Introductionmentioning

confidence: 99%

Monolithically integrated multi-wavelength VCSEL arrays using high-contrast gratings

et al. 2010

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We propose a novel design for multi-wavelength arrays of vertical cavity surface-emitting lasers (VCSELs) using high-contrast gratings (HCGs) as top mirrors. A range of VCSEL cavity wavelengths in excess of 100 nm is predicted by modifying only the period and duty-cycle of the high-contrast gratings, while leaving the epitaxial layer thickness unchanged. VCSEL arrays fabricated with this novel design can easily accommodate the entire Er-doped fiber amplifier bandwidth with emission wavelengths defined solely by lithography with no restrictions in physical layout. Further, the entire process is identical to that of solitary VCSELs, facilitating cost-effective manufacturing.

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Wavelength control of vertical cavity surface-emitting lasers by using nonplanar MOCVD

Cited by 38 publications

References 9 publications

Recent progress of vertical-cavity surface emitting lasers: wavelength engineering and new functions

Recent progress of vertical-cavity surface emitting lasers: wavelength engineering and new functions

Advances and new functions of VCSEL photonics

Monolithically integrated multi-wavelength VCSEL arrays using high-contrast gratings

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