Wafer Scale Processing of Plasmonic Nanoslit Arrays in 200mm CMOS Fab Environment

Malachowski, Karl; Verbeeck, R.; Dupont, Tania; Chang, Cheng Jen; Yi, Li; Musa, Silke; Stakenborg, Tim; Tezcan, Deniz Sabuncuoglu; Dorpe, Pol Van

doi:10.1149/05012.0413ecst

Cited by 9 publications

(10 citation statements)

References 6 publications

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“…In addition, this design of plasmonic nanoslit is compatible with complementary metal–oxide–semiconductor (CMOS) fabrication processes, enabling wafer-level mass-manufacturing (see Supplementary Fig. 1b ) 33 , 34 . To reduce the capacitance of the membrane and prevent potential chemical reactions occurring at the interface, we have deposited a 50 nm SiO 2 layer at the backside (Si side) 35 .…”

Section: Resultsmentioning

confidence: 98%

High spatial resolution nanoslit SERS for single-molecule nucleobase sensing

et al. 2018

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Solid-state nanopores promise a scalable platform for single-molecule DNA analysis. Direct, real-time identification of nucleobases in DNA strands is still limited by the sensitivity and the spatial resolution of established ionic sensing strategies. Here, we study a different but promising strategy based on optical spectroscopy. We use an optically engineered elongated nanopore structure, a plasmonic nanoslit, to locally enable single-molecule surface enhanced Raman spectroscopy (SERS). Combining SERS with nanopore fluidics facilitates both the electrokinetic capture of DNA analytes and their local identification through direct Raman spectroscopic fingerprinting of four nucleobases. By studying the stochastic fluctuation process of DNA analytes that are temporarily adsorbed inside the pores, we have observed asynchronous spectroscopic behavior of different nucleobases, both individual and incorporated in DNA strands. These results provide evidences for the single-molecule sensitivity and the sub-nanometer spatial resolution of plasmonic nanoslit SERS.

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Section: Resultsmentioning

confidence: 98%

High spatial resolution nanoslit SERS for single-molecule nucleobase sensing

et al. 2018

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“…The processing flow of 200 mm wafer scale silicon nanocavity arrays was previously described. 28 Briefly, nanocavity structures were defined on 8 in. wafers by DUV lithography and anisotropically etched by TMAH.…”

Section: Methodsmentioning

confidence: 99%

“…Deep-UV lithography and standard process steps were used to fabricate rectangular nanoslits in the top Si layer, with open access through the whole wafer, as described in detail before. 28 Figure 1 c shows the additional processing steps. First, a 50 nm layer of PECVD SiN was deposited on the backside to reduce the device capacitance.…”

Section: Solid-state Nanopore Integrated With a Plasmonic Nanoslit Camentioning

confidence: 99%

Photoresistance Switching of Plasmonic Nanopores

Nicoli

Chang

et al. 2014

Nano Lett.

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Fast and reversible modulation of ion flow through nanosized apertures is important for many nanofluidic applications, including sensing and separation systems. Here, we present the first demonstration of a reversible plasmon-controlled nanofluidic valve. We show that plasmonic nanopores (solid-state nanopores integrated with metal nanocavities) can be used as a fluidic switch upon optical excitation. We systematically investigate the effects of laser illumination of single plasmonic nanopores and experimentally demonstrate photoresistance switching where fluidic transport and ion flow are switched on or off. This is manifested as a large (∼1–2 orders of magnitude) increase in the ionic nanopore resistance and an accompanying current rectification upon illumination at high laser powers (tens of milliwatts). At lower laser powers, the resistance decreases monotonically with increasing power, followed by an abrupt transition to high resistances at a certain threshold power. A similar rapid transition, although at a lower threshold power, is observed when the power is instead swept from high to low power. This hysteretic behavior is found to be dependent on the rate of the power sweep. The photoresistance switching effect is attributed to plasmon-induced formation and growth of nanobubbles that reversibly block the ionic current through the nanopore from one side of the membrane. This explanation is corroborated by finite-element simulations of a nanobubble in the nanopore that show the switching and the rectification.

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“…[42] Briefly, the nanocavity structures were defined on 8 in. Experimental Setup: For the experiments in Figure 3, the chip was diced into 3 × 3 mm 2 and rinsed by acetone and Isoproponyl alcohol (IPA).…”

Section: Methodsmentioning

confidence: 99%

Probing Local Potentials inside Metallic Nanopores with SERS and Bipolar Electrochemistry

Chang

Willems

et al. 2017

Advanced Optical Materials

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CommuniCation(1 of 6) 1600907 considerable attention. In addition to being used as electrodes, optical nanostructures for extraordinary light transmission, [8] fluorescence, [9] and surface-enhanced Raman spectroscopy (SERS) [10] have demonstrated additional detection and/or control capabilities. For these optical techniques, metal layers are usually unbiased, so-called floating electrode mode, whereas applying a bias voltage may induce a potential drop over the floating metallic nanopore because of its high resistance. In the field of macroscale fluidics, a sufficient DC voltage difference between the floating metal layer and the solution enables the activation of oxidation and reduction reactions. [11,12] However, on the nanoscale, the study on the local potential and electrochemical effects on floating metallic nanopores remains challenging.Local potential and related electrochemistry on floating metal electrodes has been termed "bipolar electrochemistry" [12,13] In an unbiased state, bipolar electrochemistry requires either highly confined electric fields or extremely high concentration-gradients adjacent to bipolar electrodes [14][15][16] to drive reactions and investigate optical properties. Such investigation techniques include electrochemiluminescence, [17] electrochemical corrosion microscopy, [18] epifluoresence, [19] and surface plasmon resonance spectroscopy, [20] which are ultimately restricted by the diffraction of light. Here, working toward subwavelength detection, we propose the use of SERS to study the local potentials. [21][22][23][24][25] To simultaneously align localized SERS hot spots with fluidic focus for high spatial resolution and high specificity, [26] our technique probes the local potential and characterizes nanoscale bipolar electrochemical effects on metallic nanopores for the first time. Figure 1a depicts a schematic of the experiments on the metallic nanopores. The nanopore chip was mounted into a custom-made flow cell, separating the electrolyte into two reservoirs. Next, a 785 nm laser was tightly focused at the nanopore cavity. The electrical potential was applied to the top side of the membrane as shown in Figure 1a, and the other side was connected to ground. This defines the applied bias direction for positive and negative values in the experiments. A doublesided gold (MM) nanopore is used for the demonstration of bipolar electrochemical SERS. To maximize the plasmonic enhancement effect and subsequent SERS signals at 785 nm, It is essential to understand the local potential distribution of solid-state nanopores in nanofluidic systems. However, applying gate voltage or adding external electrical probes tends to disturb the electric field and/or flow patterns. To solve this problem, an approach is described to monitor the local potential using electrochemical surface enhanced Raman spectroscopy (EC-SERS) in two types of nanocavity pores: doubled-sided gold nanopores (MM nanopores) and single-sided gold nanopores with a dielectric passivation layer on the backside (MD nanopor...

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Wafer Scale Processing of Plasmonic Nanoslit Arrays in 200mm CMOS Fab Environment

Cited by 9 publications

References 6 publications

High spatial resolution nanoslit SERS for single-molecule nucleobase sensing

High spatial resolution nanoslit SERS for single-molecule nucleobase sensing

Photoresistance Switching of Plasmonic Nanopores

Probing Local Potentials inside Metallic Nanopores with SERS and Bipolar Electrochemistry

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