Wafer scale fabrication of highly integrated rubidium vapor cells

Overstolz, T.; Haesler, Jacques; Bergonzi, Giovanni; Pezous, A.; Clerc, P.-A.; Ischer, S.; Kaufmann, Jan; Despont, M.

doi:10.1109/memsys.2014.6765700

Cited by 18 publications

(10 citation statements)

References 9 publications

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“…Another method applies the use of the physical deposition process to deposit a layer of alkali azide [45,57,58,59,60] or pipetting of water solution of alkali azide [61,62,63] on the inner side of the cell window. Compound decomposition is induced by exposing encapsulated cells to ultraviolet (UV) radiation.…”

Section: Methods Of Mems Vapor Cell Fabricationmentioning

confidence: 99%

Technological Assessment of MEMS Alkali Vapor Cells for Atomic References

Knapkiewicz

2018

Micromachines

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This paper is a review that surveys work on the fabrication of miniature alkali vapor cells for miniature and chip-scale atomic clocks. Technology on microelectromechanical systems (MEMS) cells from the literature is described in detail. Special attention is paid to alkali atom introduction methods and sealing of the MEMS structure. Characteristics of each technology are collated and compared. The article’s rhetoric is guided by the proposed classification of MEMS cell fabrication methods and contains a historical outline of MEMS cell technology development.

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Section: Methods Of Mems Vapor Cell Fabricationmentioning

confidence: 99%

Technological Assessment of MEMS Alkali Vapor Cells for Atomic References

Knapkiewicz

2018

Micromachines

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“…There is a constant development of new paradigms, one recent example we have discussed above is electric field sensors based on EIT with warm Rydberg atoms [117,141]. Such developments are accompanied by technological maturation of miniature-cell fabrication [26,[142][143][144], which provides more robust, versatile, and compact platforms for EIT utilization. In parallel to academic research, the technology is also developed in the industry, in both large and small companies.…”

Section: Eit As a Spectral Filtermentioning

confidence: 99%

A practical guide to electromagnetically induced transparency in atomic vapor

et al. 2023

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This tutorial introduces the theoretical and experimental basics of Electromagnetically Induced Transparency (EIT) in thermal alkali vapors. We first give a brief phenomenological description of EIT in simple three-level systems of stationary atoms and derive analytical expressions for optical absorption and dispersion under EIT conditions. Then we focus on how the thermal motion of atoms affects various parameters of the EIT system. Specifically, we analyze the Doppler broadening of optical transitions, ballistic versus diffusive atomic motion in a limited-volume interaction region, and collisional depopulation and decoherence. Finally, we discuss the common trade-offs important for optimizing an EIT experiment and give a brief "walk-through" of a typical EIT experimental setup. We conclude with a brief overview of current and potential EIT applications.

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“…The conventional method is using BaN 6 and RbCl to release the rubidium substance by chemical reaction at high temperature, but the compound is poisonous and a reverse reaction exists [ 38 ]. The improved method is the in-situ ultraviolet decomposition of RbN 3 , while the buffer gas pressure is difficult to be precisely controlled [ 39 , 40 , 41 , 42 ]. Another strategy is to use paraffin to fully cover rubidium in the glove box with MEMS molds and to transport the paraffin-rubidium package to the cell directly, regardless of atmosphere [ 43 ].…”

Section: Vapor Cell Fabricationmentioning

confidence: 99%

Microfabricated Vapor Cells with Reflective Sidewalls for Chip Scale Atomic Sensors

et al. 2018

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We investigate the architecture of microfabricated vapor cells with reflective sidewalls for applications in chip scale atomic sensors. The optical configuration in operation is suitable for both one-beam and two-beam (pump & probe) schemes. In the miniaturized vapor cells, the laser beam is reflected twice by the aluminum reflectors on the wet etched 54.7° sidewalls to prolong the optical length significantly, thus resulting in a return reflectance that is three times that of bare silicon sidewalls. To avoid limitations faced in the fabrication process, a simpler, more universal and less constrained fabrication process of microfabricated vapor cells for chip scale atomic sensors with uncompromised performance is implemented, which also decreases the fabrication costs and procedures. Characterization measurements show that with effective sidewall reflectors, mm3 level volume and feasible hermeticity, the elongated miniature vapor cells demonstrate a linear absorption contrast improvement by 10 times over the conventional micro-electro-mechanical system (MEMS) vapor cells at ~50 °C in the rubidium D1 absorption spectroscopy experiments. At the operating temperature of ~90 °C for chip scale atomic sensors, a 50% linear absorption contrast enhancement is obtained with the reflective cell architecture. This leads to a potential improvement in the clock stability and magnetometer sensitivity. Besides, the coherent population trapping spectroscopy is applied to characterize the microfabricated vacuum cells with 46.3 kHz linewidth in the through cell configuration, demonstrating the effectiveness in chip scale atomic sensors.

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Wafer scale fabrication of highly integrated rubidium vapor cells

Cited by 18 publications

References 9 publications

Technological Assessment of MEMS Alkali Vapor Cells for Atomic References

Technological Assessment of MEMS Alkali Vapor Cells for Atomic References

A practical guide to electromagnetically induced transparency in atomic vapor

Microfabricated Vapor Cells with Reflective Sidewalls for Chip Scale Atomic Sensors

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