2016 IEEE International Conference on Advanced Intelligent Mechatronics (AIM) 2016
DOI: 10.1109/aim.2016.7576792
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Wafer-scale automation of electron beam induced depositions

Patrick Elfert
1
,
Malte Bartenwerfer
2
,
Sergej Fatikow
3
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Cited by 3 publications
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Towards Robot-based Manipulation, Characterization and Automation at the Nanoscale

Fatikow
1
,
Bartenwerfer
2
,
Haenssler
3
2019
2019 International Conference on Industrial Engineering, Applications and Manufacturing (ICIEAM)
2
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3
0
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Towards Robot-based Manipulation, Characterization and Automation at the Nanoscale

Fatikow
1
,
Bartenwerfer
2
,
Haenssler
3
2019
2019 International Conference on Industrial Engineering, Applications and Manufacturing (ICIEAM)
2
0
3
0
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Combining scanning microscopy and robotics: Automated analysis and manipulation on the small scale

Bartenwerfer
1
,
Tiemerding
2
,
Haenssler
3
et al. 2017
2017 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)
1
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EBiC-Based Drift Compensation for an Automated EBiD Fabrication Process

Bartenwerfer
1
,
Fatikow
2
2019
2019 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)
0
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