Wafer Container Monitoring Concerning Airborne Molecular Contaminations along a 300 mm Power Semiconductor Production Flow

Abstract

The focus of the study was to understand the behavior of airborne molecular contaminations (AMC) within the 300 mm wafer containers called front-opening unified pods (FOUPs) in a high-volume fabrication facility for power semiconductors of Infineon Technologies Dresden. A main goal was to implement new concepts and strategies to prevent the different power semiconductors from any yield losses driven by AMC. It could be shown, that there is a strong dependency of the concentration and the type of the determined contaminations on the investigated process steps.

Monitoring of Trace Molecular Impurities in Clean-Room Air

“…10 reported on volatile organic compound (VOC)-concentration in a power device manufacturing clean room. Spot measurements were done by off-line analysis of contaminants trapped by absorption in an absorber tube and measured off-line by TD_GC-MS. More reports showed results in arbitrary units [11,12]. Ref.…”