Monitoring of Trace Molecular Impurities in Clean-Room Air

Abstract

A new measurement system has been introduced to perform real-time measurements of molecular air contaminants at different location in a clean room down to a concentration of approximately 0.1 ppb. The system consists of an air sampling unit coupled to a proton transfer mass spectrometer and a Cavity Ring-Down Spectrometer. The measurements show that the time average concentrations of more than 10 different volatile impurity molecules exceed 1 ppb.