1998
DOI: 10.1016/s0168-583x(97)00807-0
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VRBS: A virtual RBS simulation tool for ion beam analysis

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Cited by 10 publications
(3 citation statements)
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“…11(a). Using a computer code developed by Hervé et al, 104 the random spectrum was successfully simulated with 3 × 10 13 4 He particles, providing confidence in the measured 4 He flux during the C-RBS analysis. Moreover, the intensity of the Pd peak remained constant for the different samples [ Fig.…”
Section: B Damage Analysis From C-rbs Experimentsmentioning
confidence: 99%
“…11(a). Using a computer code developed by Hervé et al, 104 the random spectrum was successfully simulated with 3 × 10 13 4 He particles, providing confidence in the measured 4 He flux during the C-RBS analysis. Moreover, the intensity of the Pd peak remained constant for the different samples [ Fig.…”
Section: B Damage Analysis From C-rbs Experimentsmentioning
confidence: 99%
“…To determine the concentrations of 13 [20]. The spectra were calibrated by using bare SiO 2 and SiC samples for oxygen and carbon nuclear reactions, respectively, and were further analyzed with the home-made SAM software (Systeme d'Analyse des Materiaux) [22]. Samples were imaged by a Scanning Electron Microscope (SEM), a Phillips XL-30S operating at 3 kV.…”
Section: Methodsmentioning
confidence: 99%
“…An absorber of 11.8 μm Mylar foil was attached above the detector to stop the alpha particles generated by the 16 O(d, α) 14 N reaction and the backscattered deuterons particles. The experimental spectra were calibrated by using bare SiO 2 and SiC samples for oxygen and carbon nuclear reactions, respectively, and the spectra were then simulated with the SIMNRA software [30]. Due to the weak depth resolution of the NRA, it is not possible to differentiate surface or interface carbon from bulk carbon.…”
Section: Characterizations Of the Samplesmentioning
confidence: 99%