1998
DOI: 10.1016/s0167-9260(98)00006-6
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VLSI design in the 3rd dimension

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Cited by 16 publications
(4 citation statements)
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“…Under same conditions, simulations revealed resistivities of 3.45 cm and 3. 95 cm, for the semiglobal and local interconnects, respectively. It was also found that using any other less conformal barrier deposition technology such as ionized physical vapor deposition (IPVD) or collimated PVD (c-PVD), the resistivity values for local and semiglobal interconnects become higher than aluminum technology for the same dimensions, in about a decade.…”
Section: ) Simulation Of Surface Scattering and Barrier Thickness Efmentioning
confidence: 99%
See 1 more Smart Citation
“…Under same conditions, simulations revealed resistivities of 3.45 cm and 3. 95 cm, for the semiglobal and local interconnects, respectively. It was also found that using any other less conformal barrier deposition technology such as ionized physical vapor deposition (IPVD) or collimated PVD (c-PVD), the resistivity values for local and semiglobal interconnects become higher than aluminum technology for the same dimensions, in about a decade.…”
Section: ) Simulation Of Surface Scattering and Barrier Thickness Efmentioning
confidence: 99%
“…However, with the growing menace of delay in recent times, this technology is being viewed as a potential alternative that can not only maintain chip performance well beyond the 130-nm node, but also inspire a new generation of circuit design concepts. Hence, there has been a renewed spur in research activities in 3-D technology [95]- [100] and their performance modeling [42], [67], [101]- [104].…”
Section: A Technology Optionsmentioning
confidence: 99%
“…3D on-chip interconnection architectures have been investigated by a few researchers [4,7,24]. An NoC-Bus Hybrid structure for 3D interconnects was proposed in [7], and [4] proposed a dimensionally decomposed crossbar design for 3D NoCs.…”
Section: Noc Router Architecturesmentioning
confidence: 99%
“…Hence, it is extremely difficult to carry ICs further along the path of Moore's law beyond 32nm technologies. Recently, researchers have shown that scaling in the vertical dimension (i.e., 3D integration) can be a promising solution to mitigate interconnect delays and to put more functionality on the chip [Strickland et al 1998;Patti 2006]. In contrast to conventional 2D planar chips, this technique offers significant improvement in performance and reduction in power dissipation [Patti 2006].…”
Section: Introductionmentioning
confidence: 99%