Visual servoing of a mobile microrobot inside a scanning electron microscope

Sievers, Torsten; Fatikow, Sergej

doi:10.1109/iros.2005.1545220

Cited by 23 publications

(10 citation statements)

References 8 publications

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“…By defining a ROI around the object of interest the z-position can be calculated by DFF. The ROI can be defined manually by the user, or automatically using the image recognition approach described in [16]. In Fig.…”

Section: B Experimental Setup and Resultsmentioning

confidence: 99%

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Depth-Detection Methods for CNT Manipulation and Characterization in a Scanning Electron Microscope

Fatikow

Eichhorn

Wich

et al. 2007

2007 International Conference on Mechatronics and Automation

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Current research work on the development of a nanorobot station for the manipulation and characterization of carbon nanotubes is presented. Therefore two nanorobots are cooperating in the vacuum chamber of a scanning electron microscope (SEM). One robot is carrying a nanogripper and is used for the coarse positioning. The second robot serves as sample holder and realizes the fine positioning. In the course of automatic handling tasks, depth-detection within the SEM is required. Two different methods for the z-position estimation of gripper and carbon nanotube are proposed. On the one hand a depth from focus method using real-time processing of noisy SEM images and on the other hand a touchdown sensor concept based on a bimorph piezo bending actuator. Both methods are described in a theoretical framework and are partly verified by experimental tests.

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Section: B Experimental Setup and Resultsmentioning

confidence: 99%

“…While the (x, y)-position and orientation can be calculated directly from a single SEM image [15,16], the estimation of the z-position requires multiple images. In [17] two images, acquired with different beam angle, are used to calculate a full 3D image with high z-resolution.…”

Section: Depth From Focusmentioning

confidence: 99%

Depth-Detection Methods for CNT Manipulation and Characterization in a Scanning Electron Microscope

Fatikow

Eichhorn

Wich

et al. 2007

2007 International Conference on Mechatronics and Automation

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“…Therefore, a real-time imaging system is still necessary for use during manipulation. To recognize the probe edge position, scanning electron microscopes (SEMs) have been combined with AFMs [21][22][23][24][25][26][27][28]. SEM provides detailed morphological information, allowing for high magnification and excellent depth of field.…”

Section: Introductionmentioning

confidence: 99%

Development of a compact nano manipulator based on an atomic force microscope: For monitoring using a scanning electron microscope or an inverted optical microscope

Iwata

Takahashi

et al. 2012

2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3m-Nano)

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In this paper, we describe a novel nano manipulator based on an atomic force microscope (AFM). The body of the manipulator is enough compact to be operated inside the sample chamber of a scanning electron microscope (SEM). In order to realize the compact body, we employed a self-detection type cantilever for AFM observation. The cantilever includes strain resistance element, which can easily detect a deflection signal of the cantilever without other sensing devices such as optical lever systems. It is possible to observe the manipulation situation in the real time observation by using the SEM. The AFM manipulator is coupled with a haptic device for human interface. Thus, by using this system, the operator can move the AFM probe at any position on the surface with feeling the interaction force detected by the cantilever on the sample surface according to the cantilever deflection. As a performance of the system, biological samples were controllably manipulated under the SEM observation. Furthermore, in order to deal with biological samples in liquid condition, the manipulator can be coupled with an inverted optical microscope. By using the system, we successfully demonstrated manipulation of biological samples in liquid condition. Two AFM manipulators could be used for dissection of biological samples like a knife and fork.

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“…This information is usually gathered using scanning electron microscopes (SEMs), because the necessary resolution can be achieved and the vacuum chamber provides sufficient space for nanohandling robots. Since especially mobile nanohandling robots do not have internal pose sensors that could be used to determine their exact position in the world's coordinate system, it has to be derived from the SEM's visual feedback [2]. While an SEM can provide high resolution images, parts of each nanohandling robot and the specimen have to stay in the SEM's scanning region and working distance in order to extract pose information while performing an automated task.…”

Section: Introductionmentioning

confidence: 99%

CameraMan: A multirobot system for nanohandling in a scanning electron microscope

Fatikow

Jasper

Edeler

et al. 2008

2008 IEEE International Conference on Robotics and Automation

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This paper presents the detailed design of a nanohandling robot cell that can work inside an SEM's vacuum chamber and incorporates miniature video microscopes in order to enable fully automated nanohandling and -assembly. The geometrical and mechanical requirements are defined and addressed in a modular implementation. Image processing techniques can be used to recognize and track objects and three dimensional information can be obtained by stereo vision as well as the microscope's focus. To control this highly heterogeneous system, different low-level controllers are used, challenges for cooperatively controlling the multi-robot system are outlined, and high-level automation is discussed.

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Visual servoing of a mobile microrobot inside a scanning electron microscope

Cited by 23 publications

References 8 publications

Depth-Detection Methods for CNT Manipulation and Characterization in a Scanning Electron Microscope

Depth-Detection Methods for CNT Manipulation and Characterization in a Scanning Electron Microscope

Development of a compact nano manipulator based on an atomic force microscope: For monitoring using a scanning electron microscope or an inverted optical microscope

CameraMan: A multirobot system for nanohandling in a scanning electron microscope

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