Development of a compact nano manipulator based on an atomic force microscope: For monitoring using a scanning electron microscope or an inverted optical microscope

Abstract

In this paper, we describe a novel nano manipulator based on an atomic force microscope (AFM). The body of the manipulator is enough compact to be operated inside the sample chamber of a scanning electron microscope (SEM). In order to realize the compact body, we employed a self-detection type cantilever for AFM observation. The cantilever includes strain resistance element, which can easily detect a deflection signal of the cantilever without other sensing devices such as optical lever systems. It is possible to observe the manipulation situation in the real time observation by using the SEM. The AFM manipulator is coupled with a haptic device for human interface. Thus, by using this system, the operator can move the AFM probe at any position on the surface with feeling the interaction force detected by the cantilever on the sample surface according to the cantilever deflection. As a performance of the system, biological samples were controllably manipulated under the SEM observation. Furthermore, in order to deal with biological samples in liquid condition, the manipulator can be coupled with an inverted optical microscope. By using the system, we successfully demonstrated manipulation of biological samples in liquid condition. Two AFM manipulators could be used for dissection of biological samples like a knife and fork.

Progress and development in multiple-probe scanning probe microscopes

“…触觉反馈的加入使得纳米操作更为直观. Iwata 等人 [82] 和Bolopion等人 [83] 分别开发了具有实时触觉 反馈的纳米镊子系统, 他们采用不同的偏转检测方 法, Iwata等人利用自检测探针, 而Bolopion等人采用 的是激光反射法. [59] , ZnO [60] QP-STM Bi 2 Se 3 [61] , CoSi 2 [43,62] 二维 DP-STM Au表面 [63] , 3-octylthiophene薄膜 [64,65] , 石墨烯 [66,67] DP-AFM α-sexithiophene [44] , 并五苯薄膜 [68] QP-STM 石墨烯 [69,70] , Si(111)4×1-In [71] , Bi 2 Te 2 Se表面 [72,73] , Pentacene薄膜 [74,75] , Au表面 [76] , Te/Si(111)-(1×1)界面 [77] 评 述 图 6 DP-AFM并行成像与操作 [33] .…”