Virtual prototyping of a MEMS capacitive pressure sensor for TPMS using Intellisuite&amp;#x00AE;

Deepika,; Mittal, Mandeep; Sharma, Anurekha

doi:10.1109/ispts.2012.6260867

Cited by 3 publications

(1 citation statement)

References 2 publications

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“…Tahmasebipour and Modarres simulated a highly sensitive piezoresistive differential pressure microsensor. They reported that the sensitivity of the proposed microsensor was increased about 60 times, as compared whit the base model [17]. Barua et al showed that micro-pumps have a key dynamic role in the control over drug dispensation.…”

Section: Introductionmentioning

confidence: 99%

Multiphysics simulation of piezoresistive pressure microsensor using finite element method

Pashmforoush¹

2021

FME Transactions

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In this study, the electro-mechanical behavior of a specially designed highsensitive piezoresistor pressure microsensor was simulated using finite element method, through COMSOL multiphysics software. The mechanical deformation of the diaphragm and the distribution of electrical potential in the piezoresistive were evaluated for various pressure values. In order to determine the influence of the temperature sensitivity parameter, different temperature conditions were investigated. According to the obtained results, by increase of the applied pressure, the resistance of the piezoresistor decreased, while, the sensitivity increased. Also, it was observed that at constant pressure, as the temperature increases, the stress on the diaphragm surface decreases, indicating high stress distribution at the sides and the middle of the diaphragm at low temperatures such as -50 °C. Furthermore, the obtained results demonstrated that temperature variations were not very effective on the potential distribution in the piezoresistor. However, the temperature coefficient of sensitivity demonstrated an increasing tendency with increase of the temperature from -50 °C to 50 °C.

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Section: Introductionmentioning

confidence: 99%

Multiphysics simulation of piezoresistive pressure microsensor using finite element method

Pashmforoush¹

2021

FME Transactions

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Design and analysis of high performance MEMS capacitive pressure sensor for TPMS

Sharma

Singh

2013

2013 International Conference on Control, Automation, Robotics and Embedded Systems (CARE)

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Design and analysis of a touch mode MEMS capacitive pressure sensor for IUPC

Sharma

2015

2015 19th International Symposium on VLSI Design and Test

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In this paper, a novel design of diaphragm based pressure sensor has been proposed, which may find its application in Intra Uterine Pressure Catheter (IUPC) system. The novelty of the device lies in the fact that it has got patterned slots over the top layer of the diaphragm similar to a chess-board pattern. This sensor is then compared with a plane diaphragm of same dimensions. In same range of input pressure, results show that the plane diaphragm has capacitive sensitivity of 0.06385 pF/kPa, while in the slotted diaphragm, it is 0.17355 pF/kPa, three times as that of the plane one. However, the static pull-in voltage comes out to be almost 16 volt due to constant air gap of 0.4 µm for both the cases. Due to pull-in voltage in the range of 11-20 volts, it can also be used as an electrostatic actuator in switching networks.

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Virtual prototyping of a MEMS capacitive pressure sensor for TPMS using Intellisuite®

Cited by 3 publications

References 2 publications

Multiphysics simulation of piezoresistive pressure microsensor using finite element method

Multiphysics simulation of piezoresistive pressure microsensor using finite element method

Design and analysis of high performance MEMS capacitive pressure sensor for TPMS

Design and analysis of a touch mode MEMS capacitive pressure sensor for IUPC

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