Virtual Fabrication and Analysis of Flexible Micromachined Touch Mode Capacitive Sensor for Pressure Measurement

Abstract

Now a days capacitive touch sensors are widely used in consumer products like MP3 players, mobile phones and other portable devices. More and more the technology is utilized in further application fields such as household appliances as well as automotive and industrial applications. There are several reasons for this development as for reasons of usability, robustness and cost efficiency. Capacitive pressure sensors work by detecting the change in capacitance between a fixed plate and the flexible plate. The major difficulty to the designer is the dimensions and properties used in the simulation of the MEMS devices cannot be exactly followed during fabrication. In order to overcome this problem, we must test the device in simulation for bound of parameters involved in it. This will be done by using Intellisuite software modules like Intellifab, Thermoelectromechanical analysis module, Synple etc.