Vibration measurement based on the optical cross-correlation technique with femtosecond pulsed laser

Han, Jianhua; Wu, Tong; Zhao, Chunbo; Li, Shuyi

doi:10.1117/12.2246553

Cited by 1 publication

(1 citation statement)

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“…[156,157] The future application of optical interferometric accelerometers in motors will be presented with intelligent and multi-functional development characteristics, which could simultaneously monitor the health status of motors, actuators, and bearings on the actuators (Figure 46b). [158]…”

Section: Figure 49mentioning

confidence: 99%

Optical Interferometric MEMS Accelerometers

Zhao,

Qi,

Wang

et al. 2023

Laser & Photonics Reviews

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Laser interferometry is one of the most accurate measurement technologies whose displacement resolution can reach the femtometer (fm) level. With the development of Micro‐Electro‐Mechanical Systems(MEMS) technology, many excellent optical interferometric MEMS sensors have emerged, which play an essential role in intelligent manufacturing, aerospace, and many other fields. Among them, optical interferometric MEMS accelerometers develop rapidly due to their high sensitivity, low noise, and anti‐electromagnetic interference advantages. Lots of research in optical interferometric chip design, micro‐nano fabrication process, signal demodulation algorithm, and range extension technology are performed, and different types of MEMS accelerometers based on the optical interferometric principles are developed, which have been demonstrated and applied in the fields of disaster monitoring, equipment operation and maintenance, and resource exploration. This paper reviews the development status of optical interferometric MEMS accelerometers, mainly focusing on the critical problems and solutions that need to be solved in the development process of optical interferometric accelerometers, and finally introduces the typical application scenarios.

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Section: Figure 49mentioning

confidence: 99%