Abstract:The electrical and metallurgical annealing properties of Ge/Au/Cr/Au contacts have been studied on samples with different implantation doses. Especially the contacts with higher doses exhibit excellent thermal stability with low specific transfer resistance pt = 95 12~m. When they were annealed at 390~ for 128h, p~ was still as low as 140 t2~m. TEM cross sections of samples analyzed after a heat-treatment of 390~ revealed a smooth surface morphology and a smooth interface of the contact metal with the GaAs sub… Show more
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