Very long laser-induced graphitic pillars buried in single-crystal CVD-diamond for 3D detectors realization

Khomich, А.А.; Ashikkalieva, K. K.; Bolshakov, A. P.; Kononenko, T. V.; Ralchenko, V.G.; Konov, Vitali I.; Oliva, P.; Conte, G.; Salvatori, S.

doi:10.1016/j.diamond.2018.10.006

Cited by 18 publications

(9 citation statements)

References 41 publications

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“…In the case of micro-wave plasma-assisted CVD (MWCVD), which is the technique used for the diamond samples tested in this work, both growth rate and control of purity can be optimized; in “electronic-grade” and “optical-grade” samples, the concentrations of nitrogen and boron impurities can be reduced down to values lower than 5 and 0.5 ppb, respectively, i.e., about three orders of magnitude lower than those reported for the best (namely, type IIa) natural diamond [ 10 ]. These features, along with tissue equivalence, high radiation hardness (up to 10 MGy) and high cohesion energy (≈43 eV), make CVD diamond an elective material for the realization of high-performance dosimeters [ 11 , 12 , 13 , 14 ] and detectors for X-rays [ 15 , 16 , 17 ], UV [ 18 , 19 ], charge particles [ 20 , 21 , 22 , 23 ] and neutrons [ 24 ]. For instance, diamond detectors with long-term durability have already been successfully tested in high-radiation environments, such as those reproduced in ATLAS, a general-purpose particle physics experiment performed at the Large Hadron Collider (LHC) at CERN [ 25 ].…”

Section: Introductionmentioning

confidence: 99%

A Diamond-Based Dose-per-Pulse X-ray Detector for Radiation Therapy

et al. 2021

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One of the goals of modern dynamic radiotherapy treatments is to deliver high-dose values in the shortest irradiation time possible. In such a context, fast X-ray detectors and reliable front-end readout electronics for beam diagnostics are crucial to meet the necessary quality assurance requirements of care plans. This work describes a diamond-based detection system able to acquire and process the dose delivered by every single pulse sourced by a linear accelerator (LINAC) generating 6-MV X-ray beams. The proposed system is able to measure the intensity of X-ray pulses in a limited integration period around each pulse, thus reducing the inaccuracy induced by unnecessarily long acquisition times. Detector sensitivity under 6-MV X-photons in the 0.1–10 Gy dose range was measured to be 302.2 nC/Gy at a bias voltage of 10 V. Pulse-by-pulse measurements returned a charge-per-pulse value of 84.68 pC, in excellent agreement with the value estimated (but not directly measured) with a commercial electrometer operating in a continuous integration mode. Significantly, by intrinsically holding the acquired signal, the proposed system enables signal processing even in the millisecond period between two consecutive pulses, thus allowing for effective real-time dose-per-pulse monitoring.

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Section: Introductionmentioning

confidence: 99%

A Diamond-Based Dose-per-Pulse X-ray Detector for Radiation Therapy

et al. 2021

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“…Owing to its chemical-physical peculiarities, synthetic diamond produced by microwave plasma assisted chemical vapor deposition (MPCVD) techniques has received a great deal of attention in the design and implementation of radiation detectors. Indeed, polycrystalline and single-crystal CVD-diamond is currently used in the fabrication of X-ray [ 15 , 16 , 17 ], UV [ 18 , 19 , 20 , 21 ] and ionizing radiation [ 22 , 23 , 24 , 25 , 26 , 27 , 28 , 29 ] detectors. Moreover, diamond detectors have such distinctive characteristics that they are marketed as X-ray radiation dosimeters [ 30 ].…”

Section: Introductionmentioning

confidence: 99%

Fabry-Perot Pressure Sensors Based on Polycrystalline Diamond Membranes

et al. 2021

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Pressure sensors based on diamond membranes were designed and tested for gas pressure measurement up to 6.8 MPa. The diamond film (2” diameter, 6 μm thickness)—grown by microwave plasma chemical vapor deposition on a silicon substrate—was a starting material to produce an array of membranes with different diameters in the 130–400 μm range, in order to optimize the sensor performance. Each 5 mm × 5 mm sensing element was obtained by subsequent silicon slicing. The fixed film thickness, full-scale pressure range, and sensor sensitivity were established by a proper design of the diameter of diamond membrane which represents the sensing element for differential pressure measurement. The pressure-induced deflection of the membrane was optically measured using a Fabry-Pérot interferometer formed by a single mode optical fiber front surface and the deflecting diamond film surface. The optical response of the system was numerically simulated using geometry and the elastic properties of the diamond diaphragm, and was compared with the experiments. Depending on the diamond membrane’s diameter, the fabricated sensors displayed a good modulation depth of response over different full-scale ranges, from 3 to 300 bar. In view of the excellent mechanical, thermal, and chemical properties of diamond, such pressure sensors could be useful for performance in a harsh environment.

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“…For its high atomic volume density in lattice (10 23 atoms/cm 3 ) and its radiation hardness, it represents a key solution when used as an active material for the fabrication of miniaturized detectors for impinging charged particles [ 4 , 5 , 6 , 7 , 8 , 9 ], as well as for soft X-rays [ 10 , 11 , 12 ] and UV [ 13 , 14 , 15 ] detection. Moreover, overcoming the lack of efficient n-doping effect at room temperature of diamond, hence, the fabrication of p-n junction-based devices, post-treatments based on either laser- or ion beam-processing are able to induce a local transformation of diamond into graphite, representing a powerful methodology for the development of novel all-carbon devices for optoelectronics and photonics applications [ 16 , 17 , 18 , 19 , 20 , 21 ].…”

Section: Introductionmentioning

confidence: 99%

Thin Diamond Film on Silicon Substrates for Pressure Sensor Fabrication

et al. 2020

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Thin polycrystalline diamond films chemically vapor deposited on thinned silicon substrates were used as membranes for pressure sensor fabrication by means of selective chemical etching of silicon. The sensing element is based on a simple low-finesse Fabry–Pérot (FP) interferometer. The FP cavity is defined by the end-face of a single mode fiber and the diamond diaphragm surface. Hence, pressure is evaluated by measuring the cavity length by an optoelectronic system coupled to the single mode fiber. Exploiting the excellent properties of Chemical Vapor Deposition (CVD) diamond, in terms of high hardness, low thermal expansion, and ultra-high thermal conductivity, the realized sensors have been characterized up to 16.5 MPa at room temperature. Preliminary characterizations demonstrate the feasibility of such diamond-on-Si membrane structure for pressure transduction. The proposed sensing system represents a valid alternative to conventional solutions, overcoming the drawback related to electromagnetic interference on the acquired weak signals generated by standard piezoelectric sensors.

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Very long laser-induced graphitic pillars buried in single-crystal CVD-diamond for 3D detectors realization

Cited by 18 publications

References 41 publications

A Diamond-Based Dose-per-Pulse X-ray Detector for Radiation Therapy

A Diamond-Based Dose-per-Pulse X-ray Detector for Radiation Therapy

Fabry-Perot Pressure Sensors Based on Polycrystalline Diamond Membranes

Thin Diamond Film on Silicon Substrates for Pressure Sensor Fabrication

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