1996
DOI: 10.1016/s0257-8972(96)02979-9
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Very high rate coating deposition with intense ion and/or electron bombardment

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Cited by 23 publications
(6 citation statements)
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“…The interaction of intense-pulsed energetic beams such as ion, electron and laser beams with material has been studied extensively recently [1][2][3][4]. These pulsed beam techniques allow high energy deposition at a short time within narrow depths near the material surfaces.…”
Section: Introduction and State Of The Artmentioning
confidence: 99%
“…The interaction of intense-pulsed energetic beams such as ion, electron and laser beams with material has been studied extensively recently [1][2][3][4]. These pulsed beam techniques allow high energy deposition at a short time within narrow depths near the material surfaces.…”
Section: Introduction and State Of The Artmentioning
confidence: 99%
“…Such thin films can be made from cathodes with a low vapor pressure; an example is the preparation of DLC films from a carbon cathode, [37] where there is electron mixing operating down to greater depths of penetration than are available with the ion beam mixing. Such thin films can be made from cathodes with a low vapor pressure; an example is the preparation of DLC films from a carbon cathode, [37] where there is electron mixing operating down to greater depths of penetration than are available with the ion beam mixing.…”
Section: A Small Scale Ion And/or Electron Sourcementioning
confidence: 99%
“…The interaction of intense-pulsed energetic beams such as ion, electron and laser beams with material has been studied extensively over the past few years [1][2][3][4][5]. They are high-density energy sources that allow energy deposition at a short time within narrow depths near the material surfaces.…”
Section: Introductionmentioning
confidence: 99%