Nitride Semiconductor Technology 2020
DOI: 10.1002/9783527825264.ch5
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VerticalGaNPower Devices

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Cited by 6 publications
(3 citation statements)
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“…As a consequence of the presence of spontaneous and piezoelectric polarization charges, the large bandgap, and the high critical electric field, GaN enabled the design of HEMTs based on the AlGaN/GaN heterojunction, which are now becoming excellent candidates for RF amplifiers for 5G and beyond [39][40][41], and power devices with a operating voltage of 650 V and more [42]. In addition, vertical power transistors targeting 1200 V and above are under study [43][44][45].…”
Section: Wide-bandgap Semiconductors and Applicationsmentioning
confidence: 99%
“…As a consequence of the presence of spontaneous and piezoelectric polarization charges, the large bandgap, and the high critical electric field, GaN enabled the design of HEMTs based on the AlGaN/GaN heterojunction, which are now becoming excellent candidates for RF amplifiers for 5G and beyond [39][40][41], and power devices with a operating voltage of 650 V and more [42]. In addition, vertical power transistors targeting 1200 V and above are under study [43][44][45].…”
Section: Wide-bandgap Semiconductors and Applicationsmentioning
confidence: 99%
“…To better the breakdown voltage by removing the open base effect of N-P-N, the junction amidst the p-base and the n+ source region is connected to the source contact. Due to the inversion layer of the MOS structure, the channel is formed (located at the etched sidewall) [69].…”
Section: Classification Of Semiconductor Power Devicesmentioning
confidence: 99%
“…Despite the high density o threading dislocations (~10 8 -10 9 cm 2 ) [22], originating rom the lattice and thermal expansion coecient mismatch with the substrate, low-cost heteroepitaxial GaN on sapphire is widely employed in optoelectronics, whereas GaN grown on Si and on semi-insulating SiC are employed in medium-voltage (650-900 V) power transistors and RF transistors, respectively. On the other hand, low-dislocation-density (<10 5 cm 2 ) n-GaN homoepitaxial layers on n + bulk GaN [22] are necessary or the implementation o vertical transistors and diodes, allowing to ully exploit the potential o GaN at higher voltage/current rating [23]. Although ree-standing GaN still remain high-cost substrates, large improvement in the bulk growth methods have been made during last decade [24], and high quality bulk GaN waers up to 100 mm diameter are now available.…”
Section: Introductionmentioning
confidence: 99%