Vertical coupled-cavity microinterferometer on GaAs with deformable-membrane top mirror

Larson, M.C.; Pezeshki, B.; Harris, James S.

doi:10.1109/68.376809

Cited by 81 publications

(29 citation statements)

References 8 publications

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“…Early work in AlGaAs [98], [99] has led to the rapid development of this field with several important contributors [100]- [102], and it has also led to the creation of MEMS tunable vertical cavity surface emitting semiconductor lasers (VCSELs) (for an in-depth description of MEMS tunable VCSELs, see [103]). This type of fabrication process results in excellent mirrors, but the process is not compatible with silicon technology.…”

Section: E Spectral Intensity Filtersmentioning

confidence: 99%

Optical MEMS for Lightwave Communication

Solgaard

Ford

2006

J. Lightwave Technol.

303

141

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Abstract-The intensive investment in optical microelectromechanical systems (MEMS) in the last decade has led to many successful components that satisfy the requirements of lightwave communication networks. In this paper, we review the current state of the art of MEMS devices and subsystems for lightwave communication applications. Depending on the design, these components can either be broadband (wavelength independent) or wavelength selective. Broadband devices include optical switches, crossconnects, optical attenuators, and data modulators, while wavelength-selective components encompass wavelength add/drop multiplexers, wavelength-selective switches and crossconnects, spectral equalizers, dispersion compensators, spectrometers, and tunable lasers. Integration of MEMS and planar lightwave circuits, microresonators, and photonic crystals could lead to further reduction in size and cost.

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Section: E Spectral Intensity Filtersmentioning

confidence: 99%

Optical MEMS for Lightwave Communication

Solgaard

Ford

2006

J. Lightwave Technol.

303

141

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“…48) Ultra-fast 850-1060 nm VCSELs have been developed worldwide, which show a 3-dB modulation bandwidth over 20 GHz. 36,37) Various approaches to boost the speed of VCSELs have been studied, including injection locking, 49) coupled cavity 38,50) and modulator-integration. 39) We proposed the optical feedback scheme for enhancing the modulation bandwidth of VCSELs.…”

Section: High Speed Operations Of Vcselsmentioning

confidence: 99%

“…[31][32][33] Ultrahigh capacity chip-to-chip optical interconnect based on WDM VCSEL arrays was demonstrated, leading to a total bit rate approaching 1 Tb/s. 34) MEMS (micro electro mechanical system) based tunable VCSELs [35][36][37] are attracting much interest because of their wide continuous tuning. Wide continuous wavelength tuning has been demonstrated when electrostatic force is used for moving a cantilever structure in micromachined VCSELs.…”

Section: Introductionmentioning

confidence: 99%

Advances and new functions of VCSEL photonics

Koyama

2014

OPT REV

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A vertical cavity surface emitting laser (VCSEL) was born in Japan. The 37 years' research and developments opened up various applications including datacom, sensors, optical interconnects, spectroscopy, optical storages, printers, laser displays, laser radar, atomic clock and high power sources. A lot of unique features have been already proven, such as low power consumption, a wafer level testing and so on. The market of VCSELs has been growing up rapidly and they are now key devices in local area networks based on multi-mode optical fibers. Optical interconnections in data centers and supercomputers are attracting much interest. In this paper, the advances on VCSEL photonics will be reviewed. We present the high-speed modulation of VCSELs based on a coupled cavity structure. For further increase in transmission capacity per fiber, the wavelength engineering of VCSEL arrays is discussed, which includes the wavelength stabilization and wavelength tuning based on a micro-machined cantilever structure. We also address a lateral integration platform and new functions, including high-resolution beam scanner, vortex beam creation and large-port free space wavelength selective switch with a Bragg reflector waveguide.

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“…Recently, a new type of fiberpigtailed, voltage-tunable Fabry-Perot filter, based on MEMS (Micro ElectroMechanical System) technology has been introduced having potentially higher bandwidth. The new filter also comprises a Fabry-Perot cavity, or etalon, but here the cavity length is varied by the movement of a thin diaphragm containing an optical reflector [Jer91,Lar95 ].…”

Section: Introductionmentioning

confidence: 99%

Comparison of the Frequency Response and Voltage Tuning Characteristics of a FFP and a MEMS Fiber Optic Tunable Filter

Bucholtz¹,

Seaver²,

Todd³

2004

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Public reporting burden for this collection of information is estimated to average 1 hour per response, including the time for reviewing instructions, searching existing data sources, gathering and maintaining the data needed, and completing and reviewing this collection of Information. Send comments regarding this burden estimate or any other aspect of this collection of Information, including suggestions for reducing this burden to Department of Defense, Washington Headquarters Services, Directorate for Information Operations and Reports (0704-0188), 1215 Jefferson Davis Highway, Suite 1204, Arlington, VA 22202-4302. Respondents should be aware that notwithstanding any other provision of law, no person shall be subject to any penalty for failing to comply with a collection of information if it does not display a currently valid OMB control number. PLEASE DO NOT RETURN YOUR FORM TO THE ABOVE ADDRESS. REPORT DATE (DD-MM-YYYY)2. REPORT TYPE 3. DATES COVERED (From -To) Tunable optical filters based on a Fabry-Perot element are a critical component in many wavelength based fiber optic sensor systems. This report compares the performance of two fiber-pigtailed tunable optical filters, the fiber Fabry-Perot (FFP) filter from Micron Optics and a recently developed type of tunable filter based on Micro Electro-Mechanical System (MEMS) technology from Nortel. The findings indicate that while both filters have similar bandpass characteristics, the FFP scans one free spectral range with a linear 0-10 volt signal while the MEMS system displays a voltage squared response and requires up to 35 volts to scan one free spectral range. The small signal response of both filters suggests that they can operate at frequencies up to 20 kHz and possibly as high as 100 kHz. SUBJECT TERMS

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Vertical coupled-cavity microinterferometer on GaAs with deformable-membrane top mirror

Cited by 81 publications

References 8 publications

Optical MEMS for Lightwave Communication

Optical MEMS for Lightwave Communication

Advances and new functions of VCSEL photonics

Comparison of the Frequency Response and Voltage Tuning Characteristics of a FFP and a MEMS Fiber Optic Tunable Filter

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