Versatile Micro and Nano Patterning Technique for TiO₂ and TiN‐Based Sol–Gel Thin Films

Abstract

This paper describes a tailored and versatile technology route to achieve micro and nanopatterning of both TiO2 and TiN thin films using a direct photo patternable sol–gel approach combined with a rapid thermal annealing and nitridation process. The approach consists in multi‐scale structuring TiO2 using laser direct writing or mask/colloidal lithography on a wide range of substrates including materials and of diverse geometry. These patterned TiO2 layers can subsequently be converted into a micro‐structured metallic TiN layer using a direct rapid thermal nitridation process that results in metallic thin films (TiN). This work demonstrates the versatility of this complete chain of soft chemistry based new process for patterning TiO2 and TiN thin films thereby avoiding expensive processes such as etching and lift‐off, while preserving their diffractive properties and high thermal stability, that is, up to 1000 °C under vacuum. The process is compatible with different kinds of substrates of different shapes and sizes. These results pave the way for developing a cost‐effective and time‐saving approach to different cutting‐edge applications such as metasurfaces, sensors, and applications in the luxury and decoration sector.

Creation of Organic/Inorganic Hybrids in Two‐Dimensional Organized Films Using Natural Materials and Control of Their Morphology

“…This mineral shows promise as a single-layer nano thin-film material for its plate-like morphology and high aspect ratio, when fabricated by single-layer exfoliation. [19][20][21][22] Several studies have been conducted on the interfacial particle films using organically modified nanoclays, including the preparation of films mixed with polymers. [23][24][25] Recent research and development has focused on nanocellulose from natural wood.…”

“…Aluminosilicate nanoclay is a natural clay mineral that occurs in inexhaustible quantities in underground mines and has received attention for its flame‐retardant properties, [18] despite relatively high mining costs. This mineral shows promise as a single‐layer nano thin‐film material for its plate‐like morphology and high aspect ratio, when fabricated by single‐layer exfoliation [19–22] . Several studies have been conducted on the interfacial particle films using organically modified nanoclays, including the preparation of films mixed with polymers [23–25] …”

Micro-nanostructuring by optical lithography and nitridation of photo-patternable TiO2 sol-gel to obtain micro-nanostructured TiN

“…A recent method has been proposed from a complete sol-gel process. It involves TiO2 sol-gel film that can be first photo-patterned and converted into TiN using thermal nitridation in an ammonia atmosphere [22][23][24][25][26] . The main benefit of using a sol-gel based process is the ability to produce submicron structures with various reproducible shapes, such as gratings 22,27, or pillars [28][29][30][31] , on large surface areas 28 without shape restrictions 32,33 .…”