Verilog-A modeling and design of a micromachined capacitive accelerometer

Haojiong, Li; Zhang, Mingming; Chen, Zhongjian; Jingqing, Huang; Meng, Xiangyun; Lu, Wengao; Zhang, Yacong; Su, Weiguo; Song, Li

doi:10.1109/edssc.2011.6117734

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2013

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“…The research of for MEMS sensors in recent years had tackled their modeling and simulation problem in deferent methods, each having its own advantages and limitations [1]- [2]. For example, the engineer will proceed with a finite element or boundary element simulation using software such as Coventor's ANALYZER, ANSYS, or FEMLAB [3][4][5][6], these methods are suit for structure and package design, Matlab and PSPICE can simulate the system behavior and this is major concerned by application engineer. But this method is often neglected by hardware or circuit designer.…”

Section: Introductionmentioning

confidence: 99%

The Applied Model and Simulation for MEMS Vibration Accelerometer Sensors

Deng

2013

AMM

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Micro-electro-mechanical systems (MEMS) have played an important role in sensor applications. When applied it in new fields, should answer the following questions: how to use it, how to investigate its work performance, why should use it and so on. To do simulation, the MEMS accelerometer Simulink model of ADXL series, the simple virtual reality model made by vrbuild2, and Sugar3.1 for windows are studied and integrated in the paper. Though compare with vibration test signal, the simulation results show this integrated method have advantage of straightforward, simple, effective.

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Section: Introductionmentioning

confidence: 99%

The Applied Model and Simulation for MEMS Vibration Accelerometer Sensors

Deng

2013

AMM

View full text Add to dashboard Cite

show abstract

Verilog-A modeling and design of a micromachined capacitive accelerometer

Cited by 1 publication

References 4 publications

The Applied Model and Simulation for MEMS Vibration Accelerometer Sensors

The Applied Model and Simulation for MEMS Vibration Accelerometer Sensors

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