The Applied Model and Simulation for MEMS Vibration Accelerometer Sensors

Abstract

Micro-electro-mechanical systems (MEMS) have played an important role in sensor applications. When applied it in new fields, should answer the following questions: how to use it, how to investigate its work performance, why should use it and so on. To do simulation, the MEMS accelerometer Simulink model of ADXL series, the simple virtual reality model made by vrbuild2, and Sugar3.1 for windows are studied and integrated in the paper. Though compare with vibration test signal, the simulation results show this integrated method have advantage of straightforward, simple, effective.