Variable wavelength, variable angle ellipsometry including a sensitivities correlation test

Bu-Abbud, George H.; Bashara, N. M.; Woollam, John A.

doi:10.1016/0040-6090(86)90212-9

Cited by 97 publications

(20 citation statements)

References 14 publications

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“…It should be noted here that the adopted wavelength regions and the range of angles of incidence were calculated on the basis of the maximum sensitivity of the experimental ellipsometric angles  and  to the small changes in the thin-film thickness. 2,34 Data were fitted to multi-layer models using the Levenberg-Marquardt algorithm. 34,35 For thickness determination of thin polymer films, we used a two-layer model (silicon substrate/silicon oxide/polymer/ambient).…”

Section: Ellipsometrymentioning

confidence: 99%

“…2,34 Data were fitted to multi-layer models using the Levenberg-Marquardt algorithm. 34,35 For thickness determination of thin polymer films, we used a two-layer model (silicon substrate/silicon oxide/polymer/ambient). Note that we did not take any roughness into account for the 'soft' polymer films (roughness set to zero), as according to AFM the rms roughness was less than 0.3 nm for 2 ð 2 µm 2 scan windows and did not exceed 0.5 nm even for 10 ð 10 µm 2 scans.…”

Section: Ellipsometrymentioning

confidence: 99%

See 1 more Smart Citation

Comparative characterisation by atomic force microscopy and ellipsometry of soft and solid thin films

Mykhaylyk

Dmitruk

Evans

et al. 2007

Surface & Interface Analysis

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Section: Ellipsometrymentioning

confidence: 99%

Section: Ellipsometrymentioning

confidence: 99%

Comparative characterisation by atomic force microscopy and ellipsometry of soft and solid thin films

Mykhaylyk

Dmitruk

Evans

et al. 2007

Surface & Interface Analysis

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show abstract

“…The MAW inversion process was done by mlnlmizing experimental 9 and 6 (or tan 9 and cos 6) versus thelr calculated values [9]. The model used included only the substrate and a homogeneous fl]m. Thls is a reasonable approximation, as the interface of a-C:H on Si includes only the native oxlde and~5 A SiCX [15], and our fllms were above I000 A thick.…”

Section: Methodsmentioning

confidence: 99%

Optical Dispersion Relations for “Diamondlike” Carbon Films

et al. 1989

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Elllpsometrlc measurements on plasma deposited "diamondIike" amorphous carbon (a-C:H) films were taken in the visible, (E -1.75 to 3.5 eV). The films were deposited on SI and their propertles were varied using high temperature (up to 750°C) anneals.The real (n) and Imaglnary (k) parts of the complex index of refraction N were obtained slmultaneously. Following the theory of Forouhl and Bloomer (Phys. Rev. B34, 7018 (1986)), a least squares fit was used to find the dispersion relations n(E) and k(E). Reasonably good fits were obtained, showing that the theory can be used for a-C:H films. Morever, the value of the energy gap Eg obtained in thls way was compared to the Eg. value using conventional Tauc plots and reasonably good agreement was obtained.

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“…Ellipsometric measurements were performed at an incidence angle of 70° and over the wavelength region of 250-1000 nm with a spectral resolution of 2 nm. The coating thickness was derived from the changes in ellipsometric parameters between the bare and coated substrates with a three-phase model (substrate-layer-air) [51]. Single-crystal (100) silicon wafers were used as substrates for the thickness measurements.…”

Section: Coatings Fabrication and Characterizationmentioning

confidence: 99%

Testing the in vitro performance of hydroxyapatite coated magnesium (AZ91D) and titanium concerning cell adhesion and osteogenic differentiation

Kleinhans¹,

Vacun

Surmenev³

et al. 2015

BioNanoMaterials

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In the current study the in vitro outcome of a degradable magnesium alloy (AZ91D) and standard titanium modified by nanostructured-hydroxyapatite (n-HA) coatings concerning cell adhesion and osteogenic differentiation was investigated by direct cell culture. The n-HA modification was prepared via radiofrequency magnetron sputtering deposition and proven by field emission scanning electron microscopy and X-ray powder diffraction patterns revealing a homogenous surface coating. Human mesenchymal stem cell (hMSCs) adhesion was examined after one and 14 days displaying an enhanced initial cell adhesion on the n-HA modified samples. The osteogenic lineage commitment of the cells was determined by alkaline phosphatase (ALP) quantification. On day one n-HA coated AZ91D exhibited a comparable ALP expression to standard tissue culture polystyrene samples. However, after 14 days solely little DNA and ALP amounts were measurable on n-HA coated AZ91D due to the lack of adherent cells.Titanium displayed excellent cell adhesion properties and ALP was detectable after 14 days. An increased pH of the culture was measured for AZ91D as well as for n-HA coated AZ91D. We conclude that n-HA modification improves initial cell attachment on AZ91D within the first 24 h. However, the effect does not persist for 14 days in in vitro conditions.

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Variable wavelength, variable angle ellipsometry including a sensitivities correlation test

Cited by 97 publications

References 14 publications

Comparative characterisation by atomic force microscopy and ellipsometry of soft and solid thin films

Comparative characterisation by atomic force microscopy and ellipsometry of soft and solid thin films

Optical Dispersion Relations for “Diamondlike” Carbon Films

Testing the in vitro performance of hydroxyapatite coated magnesium (AZ91D) and titanium concerning cell adhesion and osteogenic differentiation

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