Variable optical reflectance of a self-supported Si grating

Hane, Kazuhiro; Kobayashi, Takashi; Hu, Fangren; Kanamori, Yoshiaki

doi:10.1063/1.2193989

Cited by 40 publications

(24 citation statements)

References 8 publications

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“…2, when tuning the grating period, a variable reflectance property was exhibited in experiments. 1 Nowadays modern fabrication technology prompts us to enter into a nanometer scale era.…”

Section: Introductionmentioning

confidence: 97%

Tunable optical filters with nanostructured suspended gratings

Kobayashi

Kanamori

et al. 2009

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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Articles you may be interested inSchottky-type surface plasmon detector with nano-slit grating using enhanced resonant optical transmission In this article, the authors report a kind of nanostructured suspended grating ͑NSG͒, whose grating beams are connected with narrow mechanical springs at the center. Using an electrostatic comb drive actuator, the period of the fabricated silicon NSG is tuned from 1.20 to 1.43 m. With the increase in grating period, experimental results reveal that the resonant interference wavelengths are increased, while the resonant interference peaks are decreased. The reflectance interference resonance is associated with a leaky-mode resonance. Theoretical simulations based on a rigorous coupled-wave method are carried out for comparison, from which the resonant interference wavelength shift induced by the tuning grating period can be predicted. It is believed that the NSG should have practical applications in micro-optical systems, such as tunable optical filters.

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“…2, when tuning the grating period, a variable reflectance property was exhibited in experiments. 1 Nowadays modern fabrication technology prompts us to enter into a nanometer scale era.…”

Section: Introductionmentioning

confidence: 97%

Tunable optical filters with nanostructured suspended gratings

Kobayashi

Kanamori

et al. 2009

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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“…1, thus allowing wavelength-tunable filters, optical modulators, and reconfigurable OADMs to be realized. Wavelength tuning can be accomplished by varying the grating period [13], the angle of incidence [14], or the index of refraction of the grating [15] or an adjacent layer [16]. We have chosen to investigate the latter approach, in which the resonance wavelength is controlled by varying the refractive index of the superstrate medium (n 1 ).…”

Section: Introductionmentioning

confidence: 99%

Micromechanical and microfluidic devices incorporating resonant metallic gratings fabricated using nanoimprint lithography

2008

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Optical filters based on resonant gratings have spectral characteristics that are lithographically defined. Nanoimprint lithography is a relatively new method for producing large area gratings with sub-micron features. Computational modeling using rigorous coupled-wave analysis allows gratings to be designed to yield sharp reflectance maxima and minima. Combining these gratings with microfluidic channels and micromechanical actuators produced using micro electromechanical systems (MEMS) technology forms the basis for producing tunable filters and other wavelength selective elements. These devices achieve tunable optical characteristics by varying the index of refraction on the surface of the grating. Coating the grating surface with water creates a 33% change in the resonant wavelength whereas bringing a grating into contact with a quartz surface shifts the resonant wavelength from 558 nm to 879 nm, a fractional change of 58%. The reflectivity at a single wavelength can be varied by approximately a factor of three. Future applications of these devices may include tunable filters or optical modulators.

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“…Subwavelength gratings have good compatibility with the micro/nanoelectromechanical systems (MEMS/ NEMS) technology in the sense that even a small motion can deliver significant optical effects. Using these features, variable optical attenuator [2] and tunable wavelength filter at telecommunication band [3] have been developed. However, the drive voltage was extremely high at approximately 100 V, and the mechanical resonance was relatively low at several kilohertz.…”

Section: Introductionmentioning

confidence: 99%

A 3.3 V operated variable transmission attenuator based on subwavelength grating

Honma

Takahashi

Ishii

et al. 2013

2013 International Conference on Optical MEMS and Nanophotonics (OMN)

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This paper presents a nanoelectromechanical system (NEMS) variable transmission attenuator based on a gap variable subwavelength grating with a low drive voltage. An array of parallel-plate actuators is deployed over a through hole. The transmitted light intensity decreased from 63.3% to 46.5% with a drive voltage of 3.2 V at a wavelength of 775 nm. INTRODUCTIONGuided-mode resonant subwavelength gratings are expected to have many advantages such as a high optical efficiency and high wavelength selectivity [1]. Subwavelength gratings have good compatibility with the micro/nanoelectromechanical systems (MEMS/ NEMS) technology in the sense that even a small motion can deliver significant optical effects. Using these features, variable optical attenuator [2] and tunable wavelength filter at telecommunication band [3] have been developed. However, the drive voltage was extremely high at approximately 100 V, and the mechanical resonance was relatively low at several kilohertz. To improve the electromechanical properties, we have recently developed novel NEMS attenuator based on a gap variable subwavelength grating with a low drive voltage [4]. In contrast to previous report, a transmission-type optical component is validated for a small optical system. In this paper, we report a variable transmission attenuator using the gap variable subwavelength grating.

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Variable optical reflectance of a self-supported Si grating

Cited by 40 publications

References 8 publications

Tunable optical filters with nanostructured suspended gratings

Tunable optical filters with nanostructured suspended gratings

Micromechanical and microfluidic devices incorporating resonant metallic gratings fabricated using nanoimprint lithography

A 3.3 V operated variable transmission attenuator based on subwavelength grating

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