Validation of a new adaptive deformable mirror concept

Abstract

A new prototype adaptive deformable mirror for future AO-systems is presented that consists of a thin continuous membrane on which push-pull actuators impose out-of-plane displacements. Each actuator has ±10µm stroke, nanometer resolution and only mW's heat dissipation. The mirror's modular design makes the mechanics, electronics and control system extendable towards large numbers of actuators. Models of the mirror are derived that are validated using influence and transfer function measurements. First results of a prototype with 427 actuators are also presented.

Electromagnetic deformable mirror for space applications

“…Over the last decade TNO, in collaboration with the technical universities of Eindhoven and Delft, developed a deformable mirror concept using electromagnetic actuators [5]. Two prototype mirrors have been built with 61 and 427 actuators in a hexagonal grid with 6.3mm pitch, as is shown in Figure 1.…”

Electromagnetic deformable mirror development at TNO

“…Each actuation principle has its own advantages and disadvantages, and the best solution can change from application to application. Over the last decade TNO, in collaboration with the technical universities of Eindhoven and Delft, developed a deformable mirror concept using electromagnetic actuators [2,3]. Two prototype mirrors have been built with 61 and 427 actuators in a hexagonal grid with 6.3mm pitch, as is shown in Figure 1.…”

Thermomechanical design, hybrid fabrication, and testing of a MOEMS deformable mirror

“…3,5 These days, electrostatically activated mirrors 6,7 and electromagnetically activated mirrors 8,9 are especially popular. The advantages of these mirrors include their great actuating capabilities, the facility of using a large number of actuators, and their manufacturing based on batch-fabrication; however, their thin deformed mirror membranes make the application in high-power laser systems difficult owing to the challenge of low stress application of high-power coatings and low heat dissipation within the membrane.…”