2010
DOI: 10.1002/pssc.200982601
|View full text |Cite
|
Sign up to set email alerts
|

UV transparent single‐crystalline bulk AlN substrates

Abstract: Bulk aluminum nitride (AlN) is a very promising substrate material for UV optoelectronics, and its UV transparency is of high interest for UV devices designed to emit through the substrate. We report on 500 μm thick bulk AlN substrates with plain UV transmittance exceeding 50% (i.e., absorption coefficients below 14 cm–1) for wavelengths from 220 nm to 380 nm in the main wafer area. Comparing the spectra of different AlN bulk samples, four major below band‐gap absorption bands are identified and interpreted ba… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

1
65
0
2

Year Published

2011
2011
2019
2019

Publication Types

Select...
6
1
1

Relationship

1
7

Authors

Journals

citations
Cited by 70 publications
(68 citation statements)
references
References 11 publications
(16 reference statements)
1
65
0
2
Order By: Relevance
“…Furthermore, AlN is believed to have a high technological potential as a substrate material for short-wavelength emitters, as the high-band-gap material is transparent up to about 200 nm 2,3 and allows for low-strain active regions composed of high-aluminum-content AlGaN. [4][5][6][7] These applications in turn triggered improvements in the growth of high-quality AlN, [8][9][10] only recently allowing us to investigate the fundamental properties of this semiconductor in unpreceded quality.…”
Section: Introductionmentioning
confidence: 99%
“…Furthermore, AlN is believed to have a high technological potential as a substrate material for short-wavelength emitters, as the high-band-gap material is transparent up to about 200 nm 2,3 and allows for low-strain active regions composed of high-aluminum-content AlGaN. [4][5][6][7] These applications in turn triggered improvements in the growth of high-quality AlN, [8][9][10] only recently allowing us to investigate the fundamental properties of this semiconductor in unpreceded quality.…”
Section: Introductionmentioning
confidence: 99%
“…Although AlN should be transparent down to 210 nm due to its wide bandgap of 6 eV, PVT-AlN substrates have shown wide optical absorption bands below the band gap in the blue and UV ranges. [35,44,45] These absorption bands are attributed to the residual impurities such as silicon, oxygen (mainly from the source materials) and carbon (mainly from the reactor parts such as TaC crucible) and intrinsic point defects, and Al vacancies. The underlying mechanisms for the formation of these bands are still under discussion.…”
Section: Growth and Optical Properties Of Bulk Aln For Duv Ledsmentioning
confidence: 99%
“…The underlying mechanisms for the formation of these bands are still under discussion. [35,39,[44][45][46][47][48][49][50] Specifically, at least three absorption bands at 2.8 eV, 3.3-4.3 eV and 4.7 eV were found and discussed for PVT-grown AlN. The origin of the 2.8 eV band is still an issue of intense debate.…”
Section: Growth and Optical Properties Of Bulk Aln For Duv Ledsmentioning
confidence: 99%
See 1 more Smart Citation
“…The reddish samples turned out to contain Fe 2+ impurity (Ilyin et al, 2010). The below band-gap absorption bands limiting UV transparency are attributed to the point defects (Bickermann et al, 2010), for example, the band-to-impurity absorption manifesting itself as yellow coloration is thought to be related to either the doubly negative charged state V…”
Section: Sublimation Growth Of Aln Crystalsmentioning
confidence: 99%