UV-Ozone Generation from Modified High Intensity Discharge Mercury Vapor Lamps for Treatment of Indium Tin Oxide Films

Santos, Emerson Roberto; Burini, Elvo Calixto; Wang, Shu Hui

doi:10.1080/01919512.2011.649132

Cited by 11 publications

(7 citation statements)

References 12 publications

(12 reference statements)

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“…First, light at λ < 243 nm splits the atmospheric oxygen molecules, and secondly light at 240 < λ < 320 nm decomposes ozone molecules to oxygen free radicals (O), which effectively performs the oxidative treatment of the ZrO x films. The chemical reactions involved when the atmospheric air is used for ozone production are [24,31] as follows:…”

Section: Mechanism Of Uv-ozone Irradiationmentioning

confidence: 99%

Influence of Post-UV/Ozone Treatment of Ultrasonic-Sprayed Zirconium Oxide Dielectric Films for a Low-Temperature Oxide Thin Film Transistor

et al. 2019

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Solution-processed metal oxides require a great deal of thermal budget in order to achieve the desired film properties. Here, we show that the deposition temperature of sprayed zirconium oxide (ZrOx) thin film can be lowered by exposing the film surface to an ultraviolet (UV) ozone treatment at room temperature. Atomic force microscopy reveals a smooth and uniform film with the root mean square roughness reduced from ~ 0.63 nm (UVO-O) to ~ 0.28 nm (UVO-120) in the UV–ozone treated ZrOx films. X-ray photoelectron spectroscopy analysis indicates the formation of a Zr–O network on the surface film, and oxygen vacancy is reduced in the ZrOx lattice by increasing the UV–ozone treatment time. The leakage current density in Al/ZrOx/p-Si structure was reduced by three orders of magnitude by increasing the UV-ozone exposure time, while the capacitance was in the range 290–266 nF/cm2, corresponding to a relative permittivity (k) in the range 5.8–6.6 at 1 kHz. An indium gallium zinc oxide (IGZO)-based thin film transistor, employing a UV-treated ZrOx gate dielectric deposited at 200 °C, exhibits negligible hysteresis, an Ion/Ioff ratio of 104, a saturation mobility of 8.4 cm2 V−1S−1, a subthreshold slope of 0.21 V.dec−1, and a Von of 0.02 V. These results demonstrate the potentiality of low-temperature sprayed amorphous ZrOx to be applied as a dielectric in flexible and low-power-consumption oxide electronics.

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Section: Mechanism Of Uv-ozone Irradiationmentioning

confidence: 99%

Influence of Post-UV/Ozone Treatment of Ultrasonic-Sprayed Zirconium Oxide Dielectric Films for a Low-Temperature Oxide Thin Film Transistor

et al. 2019

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“…Various polymer substrates offer a broad spectrum of physico-chemical properties, which can be further altered by a variety of surface treatment methods to achieve properties appropriate for each individual application. Surface treatment methods can range from large-scale ones such as chemical modification or UV-lamp treatment, changing the properties of several square meters of surface at a time [16], to precise ones affecting mere square centimeters and changing just a few atomic layers of the substrate, such as laser treatment [17]. Any kind of surface modification will lead to a change of surface chemistry and morphology, which will in turn, more or less noticeably, affect the optical, mechanical, tribological, adhesive, electrical and various other properties of the modified substrate.…”

Section: Introductionmentioning

confidence: 99%

Surface Modification of Polymer Substrates for Biomedical Applications

2017

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While polymers are widely utilized materials in the biomedical industry, they are rarely used in an unmodified state. Some kind of a surface treatment is often necessary to achieve properties suitable for specific applications. There are multiple methods of surface treatment, each with their own pros and cons, such as plasma and laser treatment, UV lamp modification, etching, grafting, metallization, ion sputtering and others. An appropriate treatment can change the physico-chemical properties of the surface of a polymer in a way that makes it attractive for a variety of biological compounds, or, on the contrary, makes the polymer exhibit antibacterial or cytotoxic properties, thus making the polymer usable in a variety of biomedical applications. This review examines four popular methods of polymer surface modification: laser treatment, ion implantation, plasma treatment and nanoparticle grafting. Surface treatment-induced changes of the physico-chemical properties, morphology, chemical composition and biocompatibility of a variety of polymer substrates are studied. Relevant biological methods are used to determine the influence of various surface treatments and grafting processes on the biocompatibility of the new surfaces—mammalian cell adhesion and proliferation is studied as well as other potential applications of the surface-treated polymer substrates in the biomedical industry.

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“…The reactor geometry and the lamp operation temperature are very important factors for the ozone production, because these parameters contribute to find the specific time of stabilization transforming the oxygen confined in ozone [ 2 ] . The reactor revealed efficient gas confinement without escaping to ambient during leakage tests.…”

Section: Resultsmentioning

confidence: 99%

“…This step is complemented by oxidative treatment using UV-Ozone technique [1,2] . This treatment on the surfaces of the TCO films changes their chemical structures removing carbon and hydrocarbon groups contributing to improve the performance of devices [3] .…”

Section: Introductionmentioning

confidence: 99%

Low cost UV-Ozone reactor mounted for treatment of electrode anodes used in P-OLEDs devices

et al. 2016

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SbstractLow cost UV-Ozone reactor using a high pressure mercury vapor lamp of 80 watts without outer bulb showed good results for treatment of ITO films used as anode electrode in the assembly of P-OLED (polymer-organic light emitting diode) devices. This study revealed 20 minutes as effective treatment time and it was verified also that the effect of UV-Ozone treatment loses its efficiency as the elapsed time increases. It was analyzed with measurements of contact angle using a droplet of PEDOT:PSS polymer. P-OLEDs devices were mounted with architecture: ITO/PEDOT:PSS/PVK/Alq 3 /Al. The PVK polymer was diluted in organic solvent of 1,2,4-trichlorobenzene with concentrations of: 5, 10, 20 and 30 mg/mL. Results revealed better performance of P-OLED devices for concentration of 5 mg/mL resulting in lower threshold voltage, elevation of electrical current and similar diode curve.

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UV-Ozone Generation from Modified High Intensity Discharge Mercury Vapor Lamps for Treatment of Indium Tin Oxide Films

Cited by 11 publications

References 12 publications

Influence of Post-UV/Ozone Treatment of Ultrasonic-Sprayed Zirconium Oxide Dielectric Films for a Low-Temperature Oxide Thin Film Transistor

Influence of Post-UV/Ozone Treatment of Ultrasonic-Sprayed Zirconium Oxide Dielectric Films for a Low-Temperature Oxide Thin Film Transistor

Surface Modification of Polymer Substrates for Biomedical Applications

Low cost UV-Ozone reactor mounted for treatment of electrode anodes used in P-OLEDs devices

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