Emerging Applications in Silicon Photonics III 2023
DOI: 10.1117/12.2656109
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Using photonic integrated circuits to improve micro-electro-mechanical systems inertial sensors: an update

Abstract: Cavity optomechanics offers significant reduction in noise and drift for inertial sensing devices by providing high signal-to-noise displacement sensing. Strong coupling between mechanical motion and optical resonances such as whispering gallery mode resonances has been shown to detect displacements at the femtometer scale. By using a photonic integrated circuit (PIC) ring resonator to detect the motion of a micro-electro-mechanical systems (MEMS) structure as it moves within the optical evanescent field, sens… Show more

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