Using femtosecond laser to fabricate highly precise interior three-dimensional microstructures in polymeric flow chip

Lee, Chia-Yu; Chang, Ting-Chou; Wang, Shau‐Chun; Chien, Chih Wei; Cheng, Chung-Wei

doi:10.1063/1.3504970

Cited by 9 publications

(4 citation statements)

References 8 publications

(4 reference statements)

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“…One of them involves active, solid components within the channels-rotating discs, dimers, particles, etc [12,13]. Another way of achieving fluid mixing is by using external fields: acoustic, electric and magnetic [14][15][16][17][18][19]. Although these techniques usually provide a very good mixing performance, they require either a complicated fabrication method for the introduction of active components or bulky equipment, further evolving into chip-in-the-lab rather than the lab-on-a-chip concept of the system.…”

Section: Introductionmentioning

confidence: 99%

Implementation of an optimized microfluidic mixer in alumina employing femtosecond laser ablation

Juodėnas¹,

Tamulevičius²,

Ulčinas³

et al. 2017

J. Micromech. Microeng.

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Manipulation of liquids at the lowest levels of volume and dimension is at the forefront of materials science, chemistry and medicine, offering important time and resource saving applications. However, manipulation by mixing is troublesome at the microliter and lower scales. One approach to overcome this problem is to use passive mixers, which exploit structural obstacles within microfluidic channels or the geometry of channels themselves to enforce and enhance fluid mixing. Some applications require the manipulation and mixing of aggressive substances, which makes conventional microfluidic materials, along with their fabrication methods, inappropriate. In this work, implementation of an optimized full scale three port microfluidic mixer is presented in a slide of a material that is very hard to process but possesses extreme chemical and physical resistance—alumina. The viability of the selected femtosecond laser fabrication method as an alternative to conventional lithography methods, which are unable to process this material, is demonstrated. For the validation and optimization of the microfluidic mixer, a finite element method (FEM) based numerical modeling of the influence of the mixer geometry on its mixing performance is completed. Experimental investigation of the laminar flow geometry demonstrated very good agreement with the numerical simulation results. Such a laser ablation microfabricated passive mixer structure is intended for use in a capillary force assisted nanoparticle assembly setup (CAPA).

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Section: Introductionmentioning

confidence: 99%

Implementation of an optimized microfluidic mixer in alumina employing femtosecond laser ablation

Juodėnas¹,

Tamulevičius²,

Ulčinas³

et al. 2017

J. Micromech. Microeng.

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show abstract

“…A recent example of the use of laser ablation for microchannel development based on a 3 layer PMMA laminate utilized two different types of lasers. 22 A 10.6 lm CO 2 laser was used to open vias in the top layer and pattern the microchannel in the middle layer. The stack was clamped together, and the second Ti:sapphire laser (800 nm, femto-second pulsed) was used to ablate the surface of the bottom layer located in the channel through the top layer to create surface patterns.…”

Section: Introductionmentioning

confidence: 99%

A parallel microfluidic channel fixture fabricated using laser ablated plastic laminates for electrochemical and chemiluminescent biodetection of DNA

Edwards

Harper²,

Polsky³

et al. 2011

Biomicrofluidics

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Herein is described the fabrication and use of a plastic multilayer 3-channel microfluidic fixture. Multilayer devices were produced by laser machining of plastic polymethylmethacrylate and polyethyleneterapthalate laminates by ablation. The fixture consisted of an array of nine individually addressable gold or gold/ITO working electrodes, and a resistive platinum heating element. Laser machining of both the fluidic pathways in the plastic laminates, and the stencil masks used for thermal evaporation to form electrode regions on the plastic laminates, enabled rapid and inexpensive implementation of design changes. Electrochemiluminescence reactions in the fixture were achieved and monitored through ITO electrodes. Electroaddressable aryl diazonium chemistry was employed to selectively pattern gold electrodes for electrochemical multianalyte DNA detection from double stranded DNA (dsDNA) samples. Electrochemical detection of dsDNA was achieved by melting of dsDNA molecules in solution with the integrated heater, allowing detection of DNA sequences specific to breast and colorectal cancers with a non-specific binding control. Following detection, the array surface could be renewed via high temperature (95 C) stripping using the integrated heating element. This versatile and simple method for prototyping devices shows potential for further development of highly integrated, multi-functional bioanalytical devices.

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“…The additional stacking and bonding procedures not only increase the complexity of fabrication, but also frequently lead to severe issues such as leakage or undesirable cross-sectional shapes. In the past decade, great attention has been paid on the fabrication of 3D microfluidic devices using femtosecond laser micromachining by which three-dimensional (3D) microfluidic structures can be directly embedded in the transparent material, owing to its unique capability of inducing highly space-selective modification inside transparent materials through the non-linear optical absorption (Marcinkevicius et al 2001;Cheng et al 2003Cheng et al , 2004aGiridhar et al 2004;Hwang et al 2004;Cheng et al 2005;Ke et al 2005;Sugioka et al 2005;An et al 2006;Hanada et al 2008;Venturini et al 2010;Matsuo et al 2009;He et al 2010;Lee et al 2010).…”

Section: Introductionmentioning

confidence: 99%

Fabrication of large-volume microfluidic chamber embedded in glass using three-dimensional femtosecond laser micromachining

Liao

Zhang

et al. 2011

Microfluid Nanofluid

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We report on fabrication of large-volume, square-shaped microfluidic chamber embedded in glass by scanning a tightly focused femtosecond laser beam inside a porous glass immersed in water. After the hollow structure is created in the porous glass substrate, the fabricated glass sample is post-annealed at 1,050°C during which it can be sintered into a compact glass. By the use of this technique, a 1 mm 9 1 mm 9 100 lm microchamber connected to four microfluidic channels is created inside the transparent glass substrate, showing that our technique allows for fabrication of not only thin channel structures with arbitrary lengths and configurations, but also hollow structures with infinitely large sizes.

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Using femtosecond laser to fabricate highly precise interior three-dimensional microstructures in polymeric flow chip

Cited by 9 publications

References 8 publications

Implementation of an optimized microfluidic mixer in alumina employing femtosecond laser ablation

Implementation of an optimized microfluidic mixer in alumina employing femtosecond laser ablation

A parallel microfluidic channel fixture fabricated using laser ablated plastic laminates for electrochemical and chemiluminescent biodetection of DNA

Fabrication of large-volume microfluidic chamber embedded in glass using three-dimensional femtosecond laser micromachining

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