Using a Walking Piezo Actuator to Drive and Control a High-Precision Stage

Merry, Rje Roel; Kleijn, N. de; Molengraft, René van de; Steinbuch, M Maarten

doi:10.1109/tmech.2008.2006756

Cited by 80 publications

(51 citation statements)

References 20 publications

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“…In practice, the legs of the walking piezomotor are often pressed against the drive surface of a stage using preload springs [12], [13]. The applied force of each piezo element (2) changes to [14] …”

Section: Identification and Resultsmentioning

confidence: 99%

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Modeling of a walking piezo actuator

Merry

Molengraft

Steinbuch

2009

2009 IEEE International Conference on Control and Automation

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Abstract-Piezo actuators are often used in positioning devices that require (sub)nanometer resolution. For the purpose of control design a model is needed. In this paper, we develop an electromechanical dynamic model of a walking piezo actuator. The walking piezo actuator contains four legs, each with two electrically separated piezo stacks. The legs are modeled as a connection of coupled mass-spring-damper systems. Using a Lagrange approach, the nonlinear system dynamics are derived. The variation in the system dynamics is assessed using linearization around different equilibrium positions. Also a static linearized approximation is derived, which describes the static relation between the supply voltages and the tip trajectories of the legs. The model is based on the physical properties of the actuator. The variation in system dynamics appears to be most significant in the movement perpendicular to the leg orientation. Experimental validation shows that the static linearized model accurately describes the tip trajectories of the legs for sinusoidal waveforms.

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Section: Identification and Resultsmentioning

confidence: 99%

“…For use in nano-motion stages [13], the piezo legs motor is rotated to have the legs horizontally pressed against a drive surface. Therefore, no gravity is added to the model.…”

Section: B Complete Modelmentioning

confidence: 99%

Modeling of a walking piezo actuator

Merry

Molengraft

Steinbuch

2009

2009 IEEE International Conference on Control and Automation

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“…The shape of the voltage signals determining the stepping phases, is optimized to enable constant velocity motion with very low disturbances. The optimized voltage shapes are based on [7]. By using an asymmetric waveform, in which the contact part of the stepping motion is significantly longer than the non-contact part, the contact parts of each leg tip overlaps, and the velocity does not drop to zero anymore.…”

Section: B Actuator Performance Testingmentioning

confidence: 99%

Extremely stable piezo mechanisms for the new gravitational wave observatory

Pijnenburg¹,

Hogenhuis²,

Rijnveld³

2017

International Conference on Space Optics — ICSO 2012

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Abstract-Detection and observation of gravitational waves requires extreme stability in the frequency range 3e-5 Hz to 1 Hz. NGO/LISA will attain this by creating a giant interferometer in space, based on free floating proof masses in three spacecrafts.To operate NGO/LISA, the following piezo mechanisms are developed: 1.A piezo stack mechanism (Point Angle Ahead Mechanism)Due to time delay in the interferometer arms, the beam angle needs to be corrected. A mechanism rotating a mirror with a piezo stack performs this task. The critical requirements are the contribution to the optical path difference (less than 1.4 pm/ Hz) and the angular jitter (less than 8 nrad/ Hz). 2.A piezo sliding mechanism (Fiber Switching Unit Actuator)To switch from primary to the redundant laser source, a Fiber Switching Unit Actuator (FSUA) is developed. The critical requirements are the coalignment of outgoing beams of <+/-1 micro radian and <+/-1 micro meter. A redundant piezo sliding mechanism rotates a wave plate over 45 degrees. 3.A piezo stepping mechanism (In Field Pointing Mechanism) Due to seasonal orbit evolution effects, beams have to be corrected over a stroke of +/-2.5 degrees. The critical requirements are the contribution to the optical path difference (less than 3.0 pm/ Hz) and the angular jitter (less than 1 nrad/ Hz). Due to the large stroke, a piezo stepping concept was selected. Dedicated control algorithms have been implemented to achieve these challenging requirements. This paper gives description of the designs and the ongoing process of qualifying the mechanisms for space applications.

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“…The motor was used until now in high precision positioning and force control applications. In [17], the motor actuated a single DOF positioning stage. The proposed control system used position feedback strategy.…”

Section: Introductionmentioning

confidence: 99%

Force control of piezoelectric walker

Uzunović

Golubovic²,

Şabanoviç

2016

IECON 2016 - 42nd Annual Conference of the IEEE Industrial Electronics Society

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Abstract-This paper is concerned with the force control of a walking piezoelectric motor, a commercially available Piezo LEGS motor. The motor is capable of providing high precision positioning control on nanometer scale, but also relatively high forces up to 6 N. The proposed force control algorithm is very simple, but effective, and it is based on a recently presented coordinate transformation. The transformation allows definition of the driving waveforms for the motor according to a desired motion of the motor legs in the plane of motion. Such a possibility opens a path for creating the y-direction interaction force between the motor legs and the rod which is enough to ensure no relative motion between the legs and the rod. Once that is achieved, one can control the x-direction force imposed by the motor rod on its environment. The presented force control scheme has been successfully validated through a series of experiments.

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Using a Walking Piezo Actuator to Drive and Control a High-Precision Stage

Cited by 80 publications

References 20 publications

Modeling of a walking piezo actuator

Modeling of a walking piezo actuator

Extremely stable piezo mechanisms for the new gravitational wave observatory

Force control of piezoelectric walker

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