1997
DOI: 10.1116/1.580451
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Use of sputtering and negative carbon ion sources to prepare carbon nitride films

Abstract: Carbon nitride may have many different uses as wear and corrosion resistant coatings, electrical insulators, and optical coatings. We report the results of using sputtering and negative carbon ion sources to prepare thin films of carbon nitride. In this work, we compare the tribological properties of the carbon nitride films that were prepared by two separate ion-beam assisted techniques. The first approach used an ONYX-2 magnetron to sputter deposit carbon in a nitrogen atmosphere with and without simultaneou… Show more

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Cited by 15 publications
(3 citation statements)
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“…The double peak observed at 2335 cm À1 was due to the CO 2 stretching mode. 28) This CO 2 absorption was caused by CO 2 gas in the atmosphere. The absorption intensity of the CO 2 peak depended on conditions in the atmosphere and in the FTIR apparatus during each operation.…”
Section: Resultsmentioning
confidence: 99%
“…The double peak observed at 2335 cm À1 was due to the CO 2 stretching mode. 28) This CO 2 absorption was caused by CO 2 gas in the atmosphere. The absorption intensity of the CO 2 peak depended on conditions in the atmosphere and in the FTIR apparatus during each operation.…”
Section: Resultsmentioning
confidence: 99%
“…The double peak observed at 2335 cm À1 was due to the CO 2 stretching mode. 20) This CO 2 absorption was caused by CO 2 gas in the atmosphere. The absorption intensity of the CO 2 peak depended on conditions in the atmosphere and in the FTIR apparatus during each operation.…”
Section: Resultsmentioning
confidence: 99%
“…This broad peak can be deconvoluted into two lines: D and G bands. The G band is responsible for the graphitic phase (in-plane vibrations of aromatic layers) and the D band for the disordered carbon networks [17][18][19][20] such as the distort graphitic phase due to the finite size of graphite crystallites. The G band represents a relatively high content of sp 2 -hybridized carbon in the deposited thin films while the D band represents mainly sp 2 -hybridized carbon with a small amount of sp 3 -hybridized carbon.…”
Section: Methodsmentioning
confidence: 99%