2022
DOI: 10.1088/1361-6463/ac83d0
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Unravelling the magnetodielectric characteristics of strain-coupled PMN-PT/FSMA multiferroic heterojunction toward flexible MEMS applications

Abstract: Flexible microelectromechanical (MEMS) devices are poised to scaffold technological innovations in the fields of wearable sensors, implantable health monitoring systems and touchless human-machine interaction. Here, we report the magnetoelectric properties of cost-effective and room-temperature sensitive 0.67Pb(Mg1/3Nb2/3)O3-0.33PbTiO3/Ni50Mn35In15 (PMN-PT/FSMA) multiferroic heterostructure integrated on flexible stainless steel substrate via RF/DC magnetron sputtering technique. The growth of the pure perovsk… Show more

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Cited by 13 publications
(28 citation statements)
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References 54 publications
(58 reference statements)
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“…89-2482] . In addition, the XRD peaks (311) and (111) at 2θ ∼50.35 and ∼25.45°, respectively, are related to the NiMnIn bottom electrode. ,, The layer structure was confirmed by plotting the Raman spectra of the sputter-deposited V 2 O 5 active switching layer (Figure c). The bonding vibration modes obtained at wave numbers 145, 284, 490, 690, and 994 cm –1 are in good concordance with previously published data.…”
Section: Resultsmentioning
confidence: 83%
See 2 more Smart Citations
“…89-2482] . In addition, the XRD peaks (311) and (111) at 2θ ∼50.35 and ∼25.45°, respectively, are related to the NiMnIn bottom electrode. ,, The layer structure was confirmed by plotting the Raman spectra of the sputter-deposited V 2 O 5 active switching layer (Figure c). The bonding vibration modes obtained at wave numbers 145, 284, 490, 690, and 994 cm –1 are in good concordance with previously published data.…”
Section: Resultsmentioning
confidence: 83%
“…Flexible metal foils are gaining significant attention over polyimides because of high-temperature usage. Stainless steel (SS) has been suggested as a flexible substrate material because of its high Young’s modulus, excellent thermal stability, and good conductivity. ,, …”
Section: Introductionmentioning
confidence: 99%
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“…The survey scan confirms the presence of various atomic species such as Mo, S, V, and N for the first spectrum and Mo, S, W, and N in other spectra of nanocomposite samples (Figure a). In both spectra, C-1s (284.98 eV) and O-1s regions appeared as a consequence of the infiltration of environmental impurities of carbon and oxygen onto the film surface, respectively. , Furthermore, the experimental data were fitted with commercially available software MultiPak 9.0 and Origin 2018 to deconvolute raw data into subpeaks. The obtained fitting envelopes for all regions are analogous to their experimental data with negligible error.…”
Section: Resultsmentioning
confidence: 99%
“…In particular, thin film-based magnetoelectric heterostructures are more promising for the on-chip integration of magnetoelectric devices and microelectromechanical system (MEMS) fabrication. 17 coupling in artificial magnetoelectrics is defined as the crossproduct of the magnetostrictive and piezoelectric effects in the constituent ferromagnetic and piezoelectric phases, respectively, and is defined by the relation 21,22,24 where α, P , , and H denote the ME coupling coefficient, piezoelectric effect, strain transfer coefficient, and magnetostrictive susceptibility. The performance of magnetoelectric coupling-based devices is usually quantified by α, and it depends on the selection of functional magnetostrictive and piezoelectric materials, their volume fraction, and interfacial characteristics.…”
Section: Introductionmentioning
confidence: 99%