The growth of ultrathin films of Cr on Cu͑001͒ over the temperature range 285-575 K is reported. Film formation has been studied by scanning tunneling microscopy, Auger electron spectroscopy, and low-energy electron diffraction. The growth is found to be three dimensional in character with the formation of irregular multilayer high islands. The deposited chromium becomes more particulate and bulklike in nature with increasing deposition temperature, with the formation of high surface outgrowths. The films are metastable and agglomerate upon annealing at higher temperatures.