Universal Mathematical Model of De-Gassing Process by Molecular Vacuum Pump

Abstract

For the first time, the universal mathematical model describing the working process of de-gassing by a molecular vacuum pump has been developed in a wide range of pumping parameters under different gas flow regimes, which allows calculating the channel parameters of disk and cylindrical molecular vacuum pumps. The adequacy of developed mathematical model is verified by comparison with the experimental data -the maximum calculating error doesn't exceed 20% Mathematical model, vacuum pump, molecular vacuum pump, optimization, pumping speed, flow part