Abstract:High-vacuum mechanical pumps are widely used in various fields of science and technology for research and industrial applications. Modern high-vacuum mechanical pumps include molecular vacuum pumps, turbomolecular vacuum pumps and hybrid turbomolecular vacuum pumps, i.e., designs that represent a turbomolecular vacuum pump with one or more additional molecular stages. There are also a number of experimental and theoretical developments that propose combinations of different types of high-vacuum pumps in which,… Show more
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