Abstract:The growth mechanism of various nanoforms of copper/copper silicide on Si substrates with different orientations is reported here. The triangular, square and rectangular copper/copper silicide nanostructures are deposited on silicon substrates with (111), (100) and (110) orientations respectively, by thermal evaporation of metallic copper at different substrate temperatures. Investigations confirm that the nanostructures consist of a pure copper layer on top of a copper silicide layer. The morphology and growt… Show more
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