Uncovered the “hidden real defect” masked by “other anomaly seen” through deep dive FA in wafer fabrication

Teo, Angela; Peng, Ng Hui; Boon, Ang Ghim; Qing, Chen Chang; Xu, Ye; Nagalingam, D.; Seng, Tam Yong; Hong, Mai Zhi; Lam, Jeffrey

doi:10.1109/ipfa.2017.8060215

2017 IEEE 24th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) 2017

DOI: 10.1109/ipfa.2017.8060215

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Uncovered the “hidden real defect” masked by “other anomaly seen” through deep dive FA in wafer fabrication

Angela Teo

Ng Hui Peng

Ang Ghim Boon

et al.

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Uncovered the “hidden real defect” masked by “other anomaly seen” through deep dive FA in wafer fabrication

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