Uncooled IR imaging using optomechanical detectors

Miao, Zhengyu; Zhang, Qingchuan; Chen, Dapeng; Dong, Fengzhong; Xiong, Zuhong; Wu, Xiaoping; Li, Chaobo; Jiao, Binbin

doi:10.1016/j.ultramic.2006.12.003

Cited by 18 publications

(21 citation statements)

References 14 publications

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“…The substrate focal-plane arrays (FPAs) used for the optical readout uncooled IR detectors are traditionally fabricated by Manuscript The supporting frames of these FPAs, just the same as the Si substrate of the substrate FPA, were considered to be the temperature-constant ones due to their large thermal conductance (these supporting frames were either 10 μm × 2 μm [7] or 5 μm × 1 μm [8] in the cross section). Hence, the microcantilevers function independently, and there is not any obvious improvement in performance.…”

Section: Introductionmentioning

confidence: 99%

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Uncooled Infrared Imaging Using a Substrate-Free Focal-Plane Array

Cheng

Zhang

et al. 2008

IEEE Electron Device Lett.

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A substrate-free 160 × 160 focal-plane array (FPA) with a 60-µm × 60-µm pitch has been developed and used for an optical readout uncooled infrared (IR) detector. The supporting frame of the FPA is a temperature-variable one due to its large decreases in both heat capacity and thermal conductance. This thermal characteristic significantly increases the temperature change of the microcantilever, which depends on both the temperature change induced by its absorption of IR radiation and the linear superposition of the temperature prechange induced by other microcantilevers, and therefore improves the performance of the substrate-free FPA. In the proposed IR detector, the fabricated FPA had an average noise equivalent temperature difference (NETD) and a response time of 330 mK and 16 ms, respectively. Its performance increased by about 4.3 times compared with that of the substrate FPA that consists of the same microcantilevers.Index Terms-Focal-plane array (FPA), infrared (IR) detectors, substrate-free, uncooled.

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Section: Introductionmentioning

confidence: 99%

“…A 160 × 160 FPA of such design using lowstress SiN x (0.3 μm in thickness) as structural material and Au (0.2 μm in thickness) as a second layer in the bimaterial legs was fabricated successfully (refer to [7] and [8] for its fabrication process and material properties). Fig.…”

Section: Introductionmentioning

confidence: 99%

Uncooled Infrared Imaging Using a Substrate-Free Focal-Plane Array

Cheng

Zhang

et al. 2008

IEEE Electron Device Lett.

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“…Using the time Fourier transform the non-stationary equation (8) with the initial condition (7) The determination of the unknown weighting coefficients is performed by the method similar to the method for the steady-state case [9]. The distinction of the non-stationary case lies in the dependence of the unknown weighting coefficients on the frequency.…”

Section: Methods Of Modellingmentioning

confidence: 99%

Modelling of non-stationary processes in optomechanical thermal microsensors

Козлов

2014

2014 15th International Conference on Thermal, Mechanical and Mulit-Physics Simulation and Experiments in Microelectronics and

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An analytical method is developed to determine the frequency response of optomechanical thermal microsensors. The three types of the microsensors are considered: microsensor with the two supporting beams in adjacent comers of the plate; microsensor with the two supporting beams in opposite comers of the plate; microsensor with the four supporting beams. Taking into account the features of each type of the microsensors, in they structures, the domains of modelling are marked out. The domains are divided into the regions with homogeneous parameters. For each region the non steady-state heat conduction equation is obtained that is solved by means of the time Fourier transform. The heat flux densities between the regions are determined using adjoint boundary conditions in the frequency domain. The analytical expression for the frequency responses of the microsensors is obtained. This method is applied to find the frequency responses, cutoff frequencies and time constants for the three types of optomechanical thermal microsensors. The dependencies of the sensitivity and the time constant on the length of the bi-material section of the beams for the microsensor with the two supporting beams in adjacent corners are obtained.

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“…Within the 8-14 mm spectral band, dP/dT t = 0.63 W/(m 2 K sr). According to G leg =A leg k/l leg , the legs' conductance G leg of a cantilever element with n-fold IMLs can be expressed as [12][13][14]:…”

Section: Thermal Response H Of Cantilever Elementmentioning

confidence: 99%

“…IR images of a 120 1C thermal object have been obtained, even though an FPA is placed in air environment [12]. Lately the author's group has fabricated an FPA containing 100 Â 100 elements (element size: 200 mm Â 200 mm) and obtained thermal images of room temperature objects with NETD of 650 mK [13,14]. To make progress toward an applicable IR imager, the sensitivity and spatial resolution of an FPA need to be improved, which means an FPA with a smaller sensor element should have a higher sensitivity.…”

Section: Introductionmentioning

confidence: 99%