Uncooled infrared imaging using bimaterial microcantilever arrays

Lavrik, Nickolay V.; Grbovic, Dragoslav; Rajic, Slobodan; Datskos, Panos G.; Forrai, D. P.; Nelson, E. W.; Devitt, John; McIntyre, B.

doi:10.1117/12.666125

Cited by 12 publications

(13 citation statements)

References 6 publications

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“…Additional image processing was used to obtain the final images shown. While the image quality was still rather crude compared to other results [6,13], it does provide a proof of principle for the MEMS design and optical readout scheme. Substantial improvements to the raw image from more uniform arrays would be needed to realize a direct-view imager.…”

Section: Direct View Lwir Imaging: Resultsmentioning

confidence: 87%

“…Here a visible laser is reflected off an array of MEMS pixels that physically deflect due to the heating caused by the absorption of the IR radiation. These optically read MEMS cantilever systems have been pursued with some success by other groups including the Oak Ridge National Laboratory [13], Agiltron* [18], and Nikon* [7]. Currently these systems utilize a visible camera to capture the visible reflections, and postprocessing of that data to obtain images.…”

Section: Direct View Lwir Imaging: Designmentioning

confidence: 98%

“…Pyroelectric sensors [11], thermoelectric sensors [11,20], diode detectors [9], capacitively sensed [6] or optically sensed [13,18,19] mechanical cantilevers (MEMS), and thermal light valve sensors [21] have all been investigated. As uncooled technologies, they all rely on thermally isolated pixels that increase in temperature as they absorb the IR radiation.…”

Section: Background: Longwave Ir Technologiesmentioning

confidence: 99%

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Opportunities in uncooled infrared imaging: A MEMS perspective

Jones¹,

Bolle²,

Ryf³

et al. 2009

Bell Labs Tech. J.

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The applications for IR imaging have traditionally been aggressively pursued by military and homeland security organizations and have trickled down to other organizations such as search and rescue, firefighting, and law enforcement. As technologies become cheaper, a wider consumer market starts to open up including consumer security (e.g., parking lot security), sporting goods, home security, home heating/inspection markets, and automotive safety systems. For example, LWIR imaging systems have recently been offered on high-end BMW automobiles; however, the high cost of these systems still makes them a luxury option for car buyers and not profitable for the car companies.The military continues to explore imaging systems where performance criteria are the most important factors: pixel count, sensitivity, and response time. Lower cost technologies are necessary to pursue consumer applications and would also be useful in the military arena for more widespread deployment

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Section: Direct View Lwir Imaging: Resultsmentioning

confidence: 87%

Section: Direct View Lwir Imaging: Designmentioning

confidence: 98%

Section: Background: Longwave Ir Technologiesmentioning

confidence: 99%

See 1 more Smart Citation

Opportunities in uncooled infrared imaging: A MEMS perspective

Jones¹,

Bolle²,

Ryf³

et al. 2009

Bell Labs Tech. J.

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“…Intensive work is currently underway to improve device performance in this spectral band. It is remarkable the good results obtained by other alternative technologies such as microcantilever based arrays [31,32]. On the other hand, MWIR photonic devices require the use of narrow band gap materials.…”

Section: Vpd Pbse: An Affordable and Mwir Uncooled Detectormentioning

confidence: 74%

Polycrystalline lead selenide: the resurgence of an old infrared detector

Vergara

Montojo

Torquemada

et al. 2007

Opto-Electronics Review

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The existing technology for uncooled MWIR photon detectors based on polycrystalline lead salts is stigmatized for being a 50-year-old technology. It has been traditionally relegated to single-element detectors and relatively small linear arrays due to the limitations imposed by its standard manufacture process based on a chemical bath deposition technique (CBD) developed more than 40 years ago. Recently, an innovative method for processing detectors, based on a vapour phase deposition (VPD) technique, has allowed manufacturing the first 2D array of polycrystalline PbSe with good electro optical characteristics. The new method of processing PbSe is an all silicon technology and it is compatible with standard CMOS circuitry. In addition to its affordability, VPD PbSe constitutes a perfect candidate to fill the existing gap in the photonic and uncooled IR imaging detectors sensitive to the MWIR photons. The perspectives opened are numerous and very important, converting the old PbSe detector in a serious alternative to others uncooled technologies in the low cost IR detection market. The number of potential applications is huge, some of them with high commercial impact such as personal IR imagers, enhanced vision systems for automotive applications and other not less important in the security/defence domain such as sensors for active protection systems (APS) or low cost seekers.Despite the fact, unanimously accepted, that uncooled will dominate the majority of the future IR detection applications, today, thermal detectors are the unique plausible alternative. There is plenty of room for photonic uncooled and complementary alternatives are needed. This work allocates polycrystalline PbSe in the current panorama of the uncooled IR detectors, underlining its potentiality in two areas of interest, i.e., very low cost imaging IR detectors and MWIR fast uncooled detectors for security and defence applications. The new method of processing again converts PbSe into an emerging technology.

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“…[70][71][72] or "A new approach to IR bimaterial detectors theory" by Djurić, et al [77]. A milestone in ORNL activities has been reached with the presentation of real room−temperature thermal images ob− tained with a bi−material cantilever FPA with a "quasi" 4f optical readout in 2006 [78,79]. The presented FPA con− sisted of a 75 μm pitch 256×256 pixel.…”

Section: Oak Ridge National Laboratorymentioning

confidence: 99%

Microthermomechanical infrared sensors

Steffanson

Rangelow

2014

Opto-Electronics Review

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We present a state-of-the-art overview of microthermomechanical infrared sensor technology. The working principle of this sensor is based on a bi-material actuated micromechanical deflection, generated by an induced temperature rise due to incident infrared radiation absorption. In order to generate a thermal image the thermomechanical deflections of the freestanding microstructures are read by either capacitive, piezoresistive or optical means. Research and development activities in this field began in the early 1990s. The development of this technology within the last 20 years has resulted in innovations such as uncooled multiband infrared detection, high-speed infrared sensing and uncooled THz imaging. This paper outlines representative milestones of this technology and analyses important results of notable groups. Significant activities on capacitive and optical readout techniques of thermomechanical infrared arrays are presented. Furthermore the advantages of microthermomechanical infrared sensors over current well-established uncooled infrared technologies are summarized. In conclusion the latest developments of this technology offer a highly potential solution for a variety of important energy-saving, safety and security applications.

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Uncooled infrared imaging using bimaterial microcantilever arrays

Cited by 12 publications

References 6 publications

Opportunities in uncooled infrared imaging: A MEMS perspective

Opportunities in uncooled infrared imaging: A MEMS perspective

Polycrystalline lead selenide: the resurgence of an old infrared detector

Microthermomechanical infrared sensors

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