Uncertainty modeling of the spatial coordinate error correction system of the CMM based on laser tracer multi-station measurement

Chen, Hongfang; Jiang, Bo; Shi, Zhaoyao; Sun, Yanqiang; Song, Huixu; Tang, Liang

doi:10.1088/1361-6501/aafb1b

Cited by 13 publications

(8 citation statements)

References 18 publications

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“…The laser tracer self-calibration algorithm and CNC rotary table geometric error separation algorithm simulation results all rely on the absolute accuracy of the length measurement by the laser tracers. However, the uncertainty of the length measurement always exists in the actual process, which has negative effects on the laser tracer self-calibration and geometric error separation results [18]. In practice, the coordinates of the measuring points and laser tracers are unknown, and the uncertainty of the length measurement has a significant impact on both.…”

Section: Laser Tracer Length Measurement Uncertaintymentioning

confidence: 99%

Influencing factors of rotary table geometric error measurement using four-station laser tracers

Zha¹

2021

Meas. Sci. Technol.

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The laser tracer multi-station measurement method has outstanding performance in computerized numerical control (CNC) rotary table geometric error measurement and separation. However, external factors, such as layout, selected distance between the target mirror and measurement coordinate system, uncertainty of the length measurement, selection of measuring radii for the rotary table, and installation deviation from the target mirror center to the rotary table surface, have negative effects on the results. In this research, the position dilution of precision in the global positioning system measurement process is introduced to evaluate the influence of the laser tracers’ positions on measurement errors. The optimal measurement layout of the laser tracer is used to select the distance between the target mirror and XY plane of the laser tracer measurement coordinate system for the simulation. Then, the influence of the length measurement uncertainty on the laser tracer self-calibration and point measurement results used for calibration is examined based on the Monte Carlo simulation method. Different measurement radii in the rotary table are selected, and four-station laser tracers are used to perform the virtual measurement and evaluate the maximum uncertainty in the X, Y, and Z directions to further determine the best measurement radii of the CNC rotary table. Finally, the effects of the deviation of the target mirror installation center on the geometric error items of the CNC rotary table are quantitatively examined through a simulation. The analysis of the influencing factors in the geometric error measurement and separation process of the CNC rotary table can help further understand how the final results are formed, so as to control the influencing factors during the measurement process and finally optimize them in practice.

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Section: Laser Tracer Length Measurement Uncertaintymentioning

confidence: 99%

Influencing factors of rotary table geometric error measurement using four-station laser tracers

Zha¹

2021

Meas. Sci. Technol.

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“…The positioning precision of laser tracer is below 1 µm [18]. The precision requirement of the laser tracer multi-station measurement system [19] built in this paper was below 1 µm, ε = 10 −4 . Through a series of experiments for the parameters, the coordinates of calibrated laser tracer stations were observed, and the optimal setting of the parameters was obtained as: β = 0.55 and σ = 0.4.…”

Section: Self-calibration Coordinates Of Laser Tracer Stationsmentioning

confidence: 99%

Calibration Method for Angular Positioning Deviation of a High-Precision Rotary Table Based on the Laser Tracer Multi-Station Measurement System

et al. 2019

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This paper proposes a calibration method for angular positioning deviation of a high-precision rotary table based on the laser tracer multi-station measurement system. The algorithm error of the calibration method for angular positioning deviation of a high-precision rotary table based on the laser tracer multi-station measurement system was mainly discussed. During the experiments, the laser tracer was fixed on the work surface of the rotary table, and the rotary was fixed on the work surface of the coordinate measurement machine (CMM). The rotary table was rotated with the same angular interval. In this case, an optimization method for calculating the coordinates of a laser tracer station by using Levenberg–Marquardt algorithm and singular value decomposition transform was proposed. Then, the angular positioning deviation of the rotary table was calibrated by an established geometric relationship model between the coordinates of laser tracer stations and the rotation angle of the rotary table. The angular positioning deviation of the high-precision rotary table was as low as ±0.9″, and the error of the calibration method was ±0.4″. The experimental results proved the feasibility of the proposed calibration method. The calibration method proposed in this paper is suitable for the case that the rotary table is not linked with the CMM, especially for large high-precision rotary tables.

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“…While research on error modeling and compensation in five-axis machine tools has been thoroughly explored, as discussed in [39,40,55], the focus on geometric error compensation within metrology systems remains largely confined to three-axes orthogonal metrology systems [56][57][58][59][60][61][62]. For fouraxes CMMs that are more complex, relevant research has been carried out by de Aquino Silva et al in [63].…”

Section: Introductionmentioning

confidence: 99%

Unified framework for geometric error compensation and shape-adaptive scanning in five-axis metrology systems

Zhang,

Yu,

Zhu

et al. 2024

Meas. Sci. Technol.

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In response to the escalating demand for precise shape metrology of complex optical surfaces, this study unveils a unified geometric error compensation and trajectory planning framework tailored for high-accuracy five-axis scanning metrology systems, which remains a notably underexplored field compared to error compensation in machine tools. Founded on a unified geometric model, the proposed framework seamlessly integrates a versatile shape-adaptive trajectory planning strategy, a thorough global error sensitivity analysis approach, and an exhaustive geometric error compensation scheme. Leveraging inverse kinematics, an innovative shape-adaptive scanning trajectory generation strategy is mathematically formulated, thereby facilitating adaptable measurement trajectory generation for diverse surface geometries. Employing forward kinematics, an exhaustive geometric error model is established to extensively address the 53 distinct geometric errors in the metrology system. This proposed error model fundamentally augments conventional geometric error models in machine tool by managing not only the geometric errors from the motion system, but also those from the probe and workpiece. To streamline the error compensation procedure, a novel global error sensitivity analysis approach is introduced, identifying both system-oriented and process-oriented sensitive geometric errors for targeted compensation. Experimental validation using a standard ball, which achieved an exceptional 89.35% reduction in the root mean square (RMS) of the measurement errors, further confirms the feasibility and effectiveness of the proposed framework. By offering an universal trajectory planning, sensitivity analysis and error compensation trinity for five-axis scanning metrology systems, this study sets the stage for precision advancements and design optimization across diverse configurations of metrology systems.

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Uncertainty modeling of the spatial coordinate error correction system of the CMM based on laser tracer multi-station measurement

Cited by 13 publications

References 18 publications

Influencing factors of rotary table geometric error measurement using four-station laser tracers

Influencing factors of rotary table geometric error measurement using four-station laser tracers

Calibration Method for Angular Positioning Deviation of a High-Precision Rotary Table Based on the Laser Tracer Multi-Station Measurement System

Unified framework for geometric error compensation and shape-adaptive scanning in five-axis metrology systems

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