Unified framework for geometric error compensation and shape-adaptive scanning in five-axis metrology systems
Wen-Hao Zhang,
Jing-Wei Yu,
Wu-Le Zhu
et al.
Abstract:In response to the escalating demand for precise shape metrology of complex optical surfaces, this study unveils a unified geometric error compensation and trajectory planning framework tailored for high-accuracy five-axis scanning metrology systems, which remains a notably underexplored field compared to error compensation in machine tools. Founded on a unified geometric model, the proposed framework seamlessly integrates a versatile shape-adaptive trajectory planning strategy, a thorough global error sensiti… Show more
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