Uncertainty investigation of grating interferometry in six degree-of-freedom motion error measurements

Lee, Cha Bum; Kim, Gyu Ha; Lee, Sun-Kyu

doi:10.1007/s12541-012-0199-8

Cited by 26 publications

(17 citation statements)

References 14 publications

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“…Nanopositioning systems are mechanical motion systems capable of nanometric dimensional precision for accuracy and resolution. Nanopositioning systems are the key to major breakthroughs in a variety of research areas and industrial applications including scanning probe microscopy [1][2][3], nanometrology [4][5][6][7], lithography [8][9][10], and semiconductor inspection [11]. Achieving large displacement range (>1 mm) along with nanometer level displacement accuracy (<50 nm), simultaneously, has been a key challenge in nanopositioning systems due to the physical limitations associated with integrating the driving mechanisms, actuators, and sensors.…”

Section: Introductionmentioning

confidence: 99%

Investigation of optical knife edge sensor for low-cost, large-range and dual-axis nanopositioning stages

et al. 2017

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We analyzed the parameter effects of an optical knife-edge sensor (OKES) and the measurement uncertainty to achieve high linearity, long range, and high accuracy for nanopositioning stage applications. The OKES utilizes interference fringes produced from diffraction across the knife-edge. The total field at the detector was calculated from superposition of the incident field and the diffracted field at the knifeedge, and the edge diffraction effects on the sensor design parameters (distance between the knife-edge and detector, wavelength and beam diameter) were investigated by using a design of experiment (DOE), 3-Level L 9 matrix from the Taguchi Method. Multi-factor experiments were designed to determine the relationship between factors affecting the interferogram and the sensor linearity. It was found that a shorter knife edge-detector distance, shorter wavelength, and larger beam diameter show high signal-tonoise ratio for sensing linearity. The OKES was modeled by using the electromagnetic wave propagation principle, and it was experimentally verified by controlling the positioning of an XY nanopositioning stage by the OKES. The sensor noise level showed X 20.1 nm and Y 19.4 nm, and the fundamental sensing limits of the OKES were estimated to be X 0.19 nm/ and Y 0.23 nm/ for a ±1.0 mm working range. These results indicate that the OKES can be a good alternative to other precision metrology tools because of its large working range, positioning accuracy, resolution, linearity, and bandwidth, as well as its compact size and low cost.

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Section: Introductionmentioning

confidence: 99%

Investigation of optical knife edge sensor for low-cost, large-range and dual-axis nanopositioning stages

et al. 2017

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“…Some important error sources can be categorized as installation error, optics errors, electronics error, and environmental error [7]- [9]. The main part of uncertainty for measurement equipment is periodic nonlinear error.…”

Section: Introductionmentioning

confidence: 99%

Impact of the Imperfect Polarizing-Beam Splitter and Quarter-Wave Plate and Non-Ideal Laser Beam on the Accuracy of Nano-Displacement Laser Encoder

2017

IJOMAM

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Abstract:In this paper, periodic nonlinear error of laser encoder for nano-displacement measurement caused by imperfection of polarizing-beam splitter (PBS), quarter-wave plate (QWP), and laser source is modeled by using the Jones matrix analysis. The results reveal that the peak-topeak nonlinearity resulting from imperfect PBS and QWP, and non-orthogonality and ellipticity of the polarized laser beams is obtained as 14.82 nm. Also, considering typical values of transmittance and reflectance coefficients of PBS and different retardation errors of QWP, the first-order and second-order nonlinearities are respectively revealed resulting from imperfect PBS and QWP.Keywords: Jones matrix, nano-displacement, nonlinearity error, polarizing-beam splitter, nanometrology, quarter-wave plate.

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“…[1][2][3][4][5][6][7][8] Precision positioning stages are the key to major breakthroughs in broad research areas and industrial applications including bio-nanotechnology, nanometrology, semiconductor manufacturing, chemical science and engineering, nano-machining and nanofabrication, material science, and high-density data storage systems. [2][3][4] Those stages often rely on flexures to provide linear or rotational motions with no friction or stiction.…”

Section: Introductionmentioning

confidence: 99%

“…The use of polymer as materials for flexure stages can be an alternative breakthrough to explore various biological, electrical, and magnetic applications because general polymers are biocompatible and electrically insulating. 2,6 Few studies on polymeric materials and those fabrication methods for positioning stage applications have been introduced to solve troublesome issues raised in conventional technologies. Thus, the polymeric flexure can be considered as being advantageous to the metallic flexure design in applications requiring an insulating material, electromagnetic inertness, bio-compatibility, and high damping.…”

Section: Introductionmentioning

confidence: 99%

Compliance and control characteristics of an additive manufactured-flexure stage

Lee

Tarbutton

2015

Review of Scientific Instruments

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This paper presents a compliance and positioning control characteristics of additive manufactured-nanopositioning system consisted of the flexure mechanism and voice coil motor (VCM). The double compound notch type flexure stage was designed to utilize the elastic deformation of two symmetrical four-bar mechanisms to provide a millimeter-level working range. Additive manufacturing (AM) process, stereolithography, was used to fabricate the flexure stage. The AM stage was inspected by using 3D X-ray computerized tomography scanner: air-voids and shape irregularity. The compliance, open-loop resonance peak, and damping ratio of the AM stage were measured 0.317 mm/N, 80 Hz, and 0.19, respectively. The AM stage was proportional-integral-derivative positioning feedback-controlled and the capacitive type sensor was used to measure the displacement. As a result, the AM flexure mechanism was successfully 25 nm positioning controlled within 500 μm range. The resonance peak was found approximately at 280 Hz in closed-loop. This research showed that the AM flexure mechanism and the VCM can provide millimeter range with high precision and can be a good alternative to an expensive metal-based flexure mechanism and piezoelectric transducer.

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Uncertainty investigation of grating interferometry in six degree-of-freedom motion error measurements

Cited by 26 publications

References 14 publications

Investigation of optical knife edge sensor for low-cost, large-range and dual-axis nanopositioning stages

Investigation of optical knife edge sensor for low-cost, large-range and dual-axis nanopositioning stages

Impact of the Imperfect Polarizing-Beam Splitter and Quarter-Wave Plate and Non-Ideal Laser Beam on the Accuracy of Nano-Displacement Laser Encoder

Compliance and control characteristics of an additive manufactured-flexure stage

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