Impact of the Imperfect Polarizing-Beam Splitter and Quarter-Wave Plate and Non-Ideal Laser Beam on the Accuracy of Nano-Displacement Laser Encoder
Abstract:Abstract:In this paper, periodic nonlinear error of laser encoder for nano-displacement measurement caused by imperfection of polarizing-beam splitter (PBS), quarter-wave plate (QWP), and laser source is modeled by using the Jones matrix analysis. The results reveal that the peak-topeak nonlinearity resulting from imperfect PBS and QWP, and non-orthogonality and ellipticity of the polarized laser beams is obtained as 14.82 nm. Also, considering typical values of transmittance and reflectance coefficients of PB… Show more
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