Unbiased line edge roughness measurement using profile-averaging method for precise roughness parameters measurement

Kizu, Ryosuke; Misumi, Ichiko; Hirai, Akiko; Gonda, Satoshi

doi:10.1117/1.jmm.21.2.024001

Cited by 1 publication

(1 citation statement)

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“…Note that the simulation results contain higher bias than the theoretical results in the high-frequency region of the PSD, even after averaging 10 000 profiles. Additional bias might be introduced by the finite point interval of the generated profile [30]. In contrast, the theoretical and simulated HHCFs well agree in the low-lag region (corresponding to the highfrequency region of the PSD), indicating that the noisecorrection technique is effective.…”

Section: Psds and Hhcfs Of Typical Noise-included Roughness Profiles:...mentioning

confidence: 86%

Effect of white noise on roughness measurements of self-affine fractals

Kizu

Misumi

Hirai³

et al. 2023

Meas. Sci. Technol.

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This study formulated and clarified the presentation of the noise-related error terms in the power spectral density (PSD) and height–height correlation function (HHCF) through a roughness analysis of self-affine fractals. Assuming the noise as white noise, this study simulated the PSD and HHCF of the noisy roughness profile in a typical situation: line-edge roughness measurements involved in semiconductor lithography technology. It was found that conventional noise-correction techniques can bias the PSD/HHCF from those of the true roughness profiles because they do not account for the residual noise-induced error. The findings obtained from the roughness analysis and simulation techniques are expected to benefit various applications, such as clarifying the quantitative residual error in specific situations, selecting the optimum analysis method (PSD or HHCF), estimating the required number of averaged profiles (measurements) that yields sufficiently small noise errors, and considering strategies for noise reduction.

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Section: Psds and Hhcfs Of Typical Noise-included Roughness Profiles:...mentioning

confidence: 86%