A frequency comb spanning more than one octave has been achieved by injecting the second-harmonic generation (780 nm) of a mode-locked fiber laser (1.56 microm) into a photonic crystal fiber. We propose and realize a novel interferometric scheme for observing the carrier-envelope offset frequency of the frequency comb. Frequency noise has been observed on the measured carrier-envelope offset frequency, which has been confirmed to be generated in the photonic crystal fiber by comparing the measured beat frequencies between cw lasers and frequency combs before and after the photonic crystal fiber. The mode-locked fiber laser is considered to be an important candidate for the light source used in realizing a compact optical frequency measurement system including applications in the telecommunication bands.
A metrological atomic force microscope with a tip-tilting mechanism (tilting-mAFM) has been developed to expand the capabilities of 3D nanometrology, particularly for highresolution topography measurements at the surfaces of vertical sidewalls and for traceable measurements of nanodevice linewidth. In the tilting-mAFM, the probe tip is tilted from vertical to 16° at maximum such that the probe tip can touch and trace the vertical sidewall of a nanometer-scale structure; the probe of a conventional atomic force microscope cannot reach the vertical surface because of its finite cone angle. Probe displacement is monitored in three axes by using high-resolution laser interferometry, which is traceable to the SI unit of length. A central-symmetric 3D scanner with a parallel spring structure allows probe scanning with extremely low interaxial crosstalk. A unique technique for scanning vertical sidewalls was also developed and applied. The experimental results indicated high repeatability in the scanned profiles and sidewall angle measurements. Moreover, the 3D measurement of a line pattern was demonstrated, and the data from both sidewalls were successfully stitched together with subnanometer accuracy. Finally, the critical dimension of the line pattern was obtained.
A new low-coherence interferometric technique is proposed for measuring the group refractive indices of dispersive samples with high accuracy. A tandem configuration of interferometers is used to compensate for the asymmetrical distortion of interferograms that results from the broad spectrum of the light source. The group refractive index can be measured without knowledge of the geometrical thickness of the sample under test. The proposed technique can successfully measure even a thick sample. Computer calculations have shown the effectiveness of the proposed technique, which was verified by preliminary experiments; the difference between the experimental result and the catalog data was 7 x 10(-4).
A signal-processing method is proposed in the fully interferometric three-dimensional (3D) imaging spectrometry. This processing computes a 3D interferogram, in which recorded fringe patterns do not directly reflect wavefront forms propagated from a polychromatic light source under measurement. This paper presents a procedure for signal processing including a synthesis of the 3D interferogram and retrieval of a set of spectral components of 3D images. We demonstrate retrieving 3D images for spectral components of two planar light sources by means of the proposed method. The procedure to synthesize the 3D interferogram in this method suggests the possibility of direct measurement of the 3D interferogram.
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