Ultrathin TiN Membranes as a Technology Platform for CMOS‐Integrated MEMS and BioMEMS Devices

Birkholz, M.; Ehwald, K.‐E.; Kulse, P.; Drews, Jürgen; Fröhlich, Maik; Haak, U.; Kaynak, Mehmet; Matthus, E.; Schulz, Katrin; Wolansky, D.

doi:10.1002/adfm.201002062

Cited by 38 publications

(26 citation statements)

References 19 publications

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“…28,29 Instead, also the compensation of residual stress gradients has been succeeded allowing for the fabrication of microelectromechanical systems with TiN actuators. 30 Due to the large Young's modulus of TiN of about 500 GPa, 31 the actuator beam has to be prepared with a thickness of only 50 nm, when sufficiently large deflections shall be achieved by a voltage of 3.5 V obtainable in 0.25 lm CMOS circuits. 30 Figure 2 displays a SEM picture of the BioMEMS prepared with SiO 2 side walls, while the upper surface is covered by a 400 nm passivation of siliconoxynitride.…”

Section: Biomems For Ghz Frequenciesmentioning

confidence: 99%

Sensing glucose concentrations at GHz frequencies with a fully embedded Biomicro-electromechanical system (BioMEMS)

Birkholz

Ehwald

Basmer

et al. 2013

Journal of Applied Physics

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The progressive scaling in semiconductor technology allows for advanced miniaturization of intelligent systems like implantable biosensors for low-molecular weight analytes. A most relevant application would be the monitoring of glucose in diabetic patients, since no commercial solution is available yet for the continuous and drift-free monitoring of blood sugar levels. We report on a biosensor chip that operates via the binding competition of glucose and dextran to concanavalin A. The sensor is prepared as a fully embedded micro-electromechanical system and operates at GHz frequencies. Glucose concentrations derive from the assay viscosity as determined by the deflection of a 50 nm TiN actuator beam excited by quasi-electrostatic attraction. The GHz detection scheme does not rely on the resonant oscillation of the actuator and safely operates in fluidic environments. This property favorably combines with additional characteristics-(i) measurement times of less than a second, (ii) usage of biocompatible TiN for bio-milieu exposed parts, and (iii) small volume of less than 1 mm-to qualify the sensor chip as key component in a continuous glucose monitor for the interstitial tissue.

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Section: Biomems For Ghz Frequenciesmentioning

confidence: 99%

Sensing glucose concentrations at GHz frequencies with a fully embedded Biomicro-electromechanical system (BioMEMS)

Birkholz

Ehwald

Basmer

et al. 2013

Journal of Applied Physics

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“…15-18 K for NbN and MoN) and they provide conductive diffusion barrier layers for electronics devices. The optical properties lead to coloured coatings for costume jewellery, and they have applications in catalysis [4][5][6][7][8][9][10][11][12][13].…”

Section: Introductionmentioning

confidence: 99%

Nitrogen-rich transition metal nitrides

Salamat

Hector

Kroll

et al. 2013

Coordination Chemistry Reviews

124

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The solid state chemistry leading to the synthesis and characterization of metal nitrides with N:M ratios > 1 is summarized. Studies of these compounds represent an emerging area of research. Most transition metal nitrides have much lower nitrogen contents, and they often form with nonor sub-stoichiometric compositions. These materials are typically metallic with often superconducting properties, and they provide highly refractory, high hardness materials with many technological applications. The higher metal nitrides should achieve formal oxidation states (OS) attaining those found among corresponding oxides, and they are expected to have useful semiconducting properties. Only a very few examples of such high OS nitrogen-rich compounds are known at present. The main group elements typically form covalently bonded nitride ceramics such as Si 3 N 4 , Ge 3 N 4 and Sn 3 N 4 , and the early transition metals Zr and Hf produce Zr 3 N 4 and Hf 3 N 4 . However, the only main example of a highly nitrided transition metal compound known to date is Ta 3 N 5 , that has a formal oxidation state +5 and is a semiconductor with visible light absorption leading to applications as a pigment and in photocatalysis. New synthesis routes are being explored to study the possible formation of other N-rich materials that are predicted to exist by ab initio calculations. There is a useful interplay between theoretical predictions and experimental synthesis studies at ambient and high pressure conditions, as we explore and establish the existence and structure-property relations of these new nitride compounds and polymorphs. Here we review the state of current investigations and indicate possible new directions for further work.[a] European Synchrotron Radiation Facility,

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“…In these situations titanium nitride may be the material of choice, as it turned out remarkably corrosion‐resistant. Its corrosion‐resistance in biotechnological applications is expressed by negligible redox rates in cyclic voltammograms when TiN was used as working electrodes. Accordingly, TiN electrodes are applied in biomedical applications such as the artificial retina implant or IHP's glucose sensor chip . TiN should always be considered as the top‐most electrode material, when the electrodes are intended to interact with bio‐milieus.…”

Section: Preparation Technologies For Microelectronic Chipsmentioning

confidence: 99%

Technology modules from micro‐ and nano‐electronics for the life sciences

Birkholz

Mai

Wenger

et al. 2015

WIREs Nanomed Nanobiotechnol

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The capabilities of modern semiconductor manufacturing offer remarkable possibilities to be applied in life science research as well as for its commercialization. In this review, the technology modules available in micro- and nano-electronics are exemplarily presented for the case of 250 and 130 nm technology nodes. Preparation procedures and the different transistor types as available in complementary metal-oxide-silicon devices (CMOS) and BipolarCMOS (BiCMOS) technologies are introduced as key elements of comprehensive chip architectures. Techniques for circuit design and the elements of completely integrated bioelectronics systems are outlined. The possibility for life scientists to make use of these technology modules for their research and development projects via so-called multi-project wafer services is emphasized. Various examples from diverse fields such as (1) immobilization of biomolecules and cells on semiconductor surfaces, (2) biosensors operating by different principles such as affinity viscosimetry, impedance spectroscopy, and dielectrophoresis, (3) complete systems for human body implants and monitors for bioreactors, and (4) the combination of microelectronics with microfluidics either by chip-in-polymer integration as well as Si-based microfluidics are demonstrated from joint developments with partners from biotechnology and medicine. WIREs Nanomed Nanobiotechnol 2016, 8:355-377. doi: 10.1002/wnan.1367 For further resources related to this article, please visit the WIREs website.

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Ultrathin TiN Membranes as a Technology Platform for CMOS‐Integrated MEMS and BioMEMS Devices

Cited by 38 publications

References 19 publications

Sensing glucose concentrations at GHz frequencies with a fully embedded Biomicro-electromechanical system (BioMEMS)

Sensing glucose concentrations at GHz frequencies with a fully embedded Biomicro-electromechanical system (BioMEMS)

Nitrogen-rich transition metal nitrides

Technology modules from micro‐ and nano‐electronics for the life sciences

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