Ultrasonic micro-motor with multilayer piezoelectric ceramic and chamfered driving tips

Zhao, Yifei; Yuan, Songmei; Chu, Xiangcheng; Gao, Shuning; Zhong, Zhou; Zhu, Cong

doi:10.1063/1.4963662

Cited by 33 publications

(8 citation statements)

References 18 publications

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“…20(b). Zhao Y et al [109] proposed an oblate-type ultrasonic standing wave micro-motor with multilayer piezoelectric ceramic and chamfered driving tips, as illustrated in startup-shutdown process under varying pulse numbers must be analyzed in detail. Wang et al [110] managed to obtain results when the vibration displacement in the Y and Z directions was extended with the increasing pulse numbers in finite element analysis software, as evinced by the measurement of the stepping distance.…”

Section: Low-voltage Drive and Open-loop Control Technology For Ultramentioning

confidence: 99%

A Review of Application and Development Trends in Ultrasonic Motors

Li¹,

Wen²,

Jia³

et al. 2020

ES Mater. Manuf.

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The structure and performance of ultrasonic motors have gradually improved with the emergence of new materials, techniques, and structural forms. Therefore, the application scope of this technology is also expanding, especially in the field of high-end equipment. This paper conducts a review of research on the application status and progress at the frontier of research on ultrasonic motors. A summary and classification of both the status of application and cutting-edge research progress are presented, including the use of ultrasonic motors in aerospace, precision, biomedical and optical engineering and the influence on ultrasonic motor design resulting from the breakthrough in advanced processing and preparation technology, structural and functional integration technology, low voltage drives and open-loop control systems. Moreover, the performance of products developed with the aid of ultrasonic motors and representative devices are compared; and state of the art ultrasonic motor designs are discussed and summarized. Finally, potential future research efforts and prospects are highlighted.

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Section: Low-voltage Drive and Open-loop Control Technology For Ultramentioning

confidence: 99%

A Review of Application and Development Trends in Ultrasonic Motors

Li¹,

Wen²,

Jia³

et al. 2020

ES Mater. Manuf.

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“…3(c). The maximum rotational speed was determined to be 898 rpm at a preload of 2 N and 922 rpm at a preload of 3 N. Table 2 shows the performance comparison of our proposed ultrasonic motor with existing miniature ultrasonic motors that use the PZT multilayer transducer (15) and crystal-oriented (Sr,Ca) 2 NaNbO 15 transducer. (16) (Sr,Ca) 2 NaNbO 15 is a lead-free piezoelectric material with great high-power characteristics reported by Doshida et al (9,10) Our proposed ultrasonic motor showed the smallest piezoelectric constant (d 33 = 77 pC/N) and a higher rotational speed than the lead-free ultrasonic motor.…”

Section: Measurementmentioning

confidence: 99%

High-power Characteristics of (Bi,Na)TiO3-BaTiO3 Ceramics and Application in Miniature Ultrasonic Motor

Miyake¹,

Harada²,

Shimizu³

et al. 2020

Sensors and Materials

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Piezoelectric materials are utilized for high-power ultrasonic devices such as ultrasonic motors, which are driven under high stress and strain. The nonlinear elastic vibration of piezoelectric materials is a critical problem because it degrades the output performance. (Bi,Na)TiO 3-BaTiO 3 (BNBT) ceramics are one of the lead-free piezoelectric materials that show outstanding characteristics under high power driving, such as stable mechanical quality factor and resonance frequency. We evaluated the high-power characteristics of BNBT ceramics by measuring complex higher-order elastic constants using a nonlinear piezoelectric vibration model. We found that the absolute value of the higher-order elastic constant of BNBT was less than 4% of Pb(Zr,Ti)O 3 (PZT). Additionally, we developed a miniature ultrasonic motor using a BNBT multilayered piezoelectric transducer. This multilayered structure was utilized to enhance the piezoelectric displacement and was equipped with elastic fins, which convert the longitudinal vibration of the multilayered piezoelectric transducer into the rotational moment of the rotor. The rotational speed reached 922 rpm at a preload of 3 N under an input voltage of 58 V pp and a resonance frequency of 60.0 kHz.

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“…Their structure is planar and thus simple, and no ferromagnetic materials are required. Some piezoelectrictype rotating micromotors have been developed, which are also called ultrasonic micromotors [6]- [8]. Electrostatic and piezoelectric micromotors typically have a high rotating speed but a low power density.…”

Section: Introductionmentioning

confidence: 99%

A Radial-flux Permanent Magnet Micromotor with 3D Solenoid Iron-core MEMS In-chip Coils of High Aspect Ratio

Tao

Sun

et al. 2020

IEEE Electron Device Lett.

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Because of the difficulty in fabricating iron-core solenoid coils by micro electro-mechanical system (MEMS) processes, existing micromotors typically have an axial-flux structure with planar spiral coils or air-core solenoid coils. However, solenoid iron-core microcoils have a higher inductance and a lower magnetic resistivity than spiral coils and air-core solenoid coils. In this study, a radialflux permanent magnet (PM) micromotor with 3D iron-core MEMS in-chip coils of high aspect ratio was designed and fabricated. The three-phase PM brushless direct current (BLDC) micromotor has four Nd-Fe-B magnet poles on a steel rotor and six solenoid Cu coils of high aspect ratio (coil height/line width = 14) in the silicon stator fabricated using MEMS processes. Iron cores were inserted into the coils, and a low-resistivity magnetic circuit was established. At 100 Hz, the inductance of a 15-turn coil was 13.2µH. The coils were embedded tightly in the silicon substrate, resulting in a good heat dissipation performance and thus a high current-carrying capacity. The hexagonal sheet-type micromotor weighed 2.25 g with a volume of 586.5 mm 3 before bearing packaging. The modeling results showed that at 10000 rpm, the torque was 676µN•m and the power density was 314 W/kg. This micromotor incorporates a conventional large-scale BLDC motor structure and the proposed design will help improve the power density and efficiency of micromotors, thereby broadening their application prospects. Index Terms-Iron-core microcoils, micromotors, permanent magnet motors, power MEMS.

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Ultrasonic micro-motor with multilayer piezoelectric ceramic and chamfered driving tips

Cited by 33 publications

References 18 publications

A Review of Application and Development Trends in Ultrasonic Motors

A Review of Application and Development Trends in Ultrasonic Motors

High-power Characteristics of (Bi,Na)TiO3-BaTiO3 Ceramics and Application in Miniature Ultrasonic Motor

A Radial-flux Permanent Magnet Micromotor with 3D Solenoid Iron-core MEMS In-chip Coils of High Aspect Ratio

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